JPS6319580U - - Google Patents

Info

Publication number
JPS6319580U
JPS6319580U JP11383586U JP11383586U JPS6319580U JP S6319580 U JPS6319580 U JP S6319580U JP 11383586 U JP11383586 U JP 11383586U JP 11383586 U JP11383586 U JP 11383586U JP S6319580 U JPS6319580 U JP S6319580U
Authority
JP
Japan
Prior art keywords
shutter
normally open
normally closed
pump
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11383586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441187Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11383586U priority Critical patent/JPH0441187Y2/ja
Publication of JPS6319580U publication Critical patent/JPS6319580U/ja
Application granted granted Critical
Publication of JPH0441187Y2 publication Critical patent/JPH0441187Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11383586U 1986-07-24 1986-07-24 Expired JPH0441187Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11383586U JPH0441187Y2 (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11383586U JPH0441187Y2 (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Publications (2)

Publication Number Publication Date
JPS6319580U true JPS6319580U (enrdf_load_stackoverflow) 1988-02-09
JPH0441187Y2 JPH0441187Y2 (enrdf_load_stackoverflow) 1992-09-28

Family

ID=30996013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11383586U Expired JPH0441187Y2 (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Country Status (1)

Country Link
JP (1) JPH0441187Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066555A (ja) * 2004-08-25 2006-03-09 Hitachi Kokusai Electric Inc 基板処理装置
JP2008157689A (ja) * 2006-12-21 2008-07-10 Bridgestone Corp 電子線照射装置用煙検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066555A (ja) * 2004-08-25 2006-03-09 Hitachi Kokusai Electric Inc 基板処理装置
JP2008157689A (ja) * 2006-12-21 2008-07-10 Bridgestone Corp 電子線照射装置用煙検出装置

Also Published As

Publication number Publication date
JPH0441187Y2 (enrdf_load_stackoverflow) 1992-09-28

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