JPS6199694U - - Google Patents

Info

Publication number
JPS6199694U
JPS6199694U JP18464584U JP18464584U JPS6199694U JP S6199694 U JPS6199694 U JP S6199694U JP 18464584 U JP18464584 U JP 18464584U JP 18464584 U JP18464584 U JP 18464584U JP S6199694 U JPS6199694 U JP S6199694U
Authority
JP
Japan
Prior art keywords
turbo
molecular pump
leak valve
evacuated chamber
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18464584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH018714Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18464584U priority Critical patent/JPH018714Y2/ja
Publication of JPS6199694U publication Critical patent/JPS6199694U/ja
Application granted granted Critical
Publication of JPH018714Y2 publication Critical patent/JPH018714Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18464584U 1984-12-05 1984-12-05 Expired JPH018714Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199694U true JPS6199694U (enrdf_load_stackoverflow) 1986-06-25
JPH018714Y2 JPH018714Y2 (enrdf_load_stackoverflow) 1989-03-08

Family

ID=30742130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18464584U Expired JPH018714Y2 (enrdf_load_stackoverflow) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH018714Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (ja) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh 真空ポンプを含む装置およびその運転方法
JP2018105300A (ja) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
JP2019525071A (ja) * 2016-08-15 2019-09-05 エドワーズ リミテッド ターボポンプ通気組立体及び方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010055058A1 (de) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh Verfahren zum Belüften einer Vakuumpumpe und Anordnung mit einer Vakuumpumpe
DE102014109005A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zum Fluten einer Vakuumkammer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (ja) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh 真空ポンプを含む装置およびその運転方法
JP2019525071A (ja) * 2016-08-15 2019-09-05 エドワーズ リミテッド ターボポンプ通気組立体及び方法
JP2018105300A (ja) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Also Published As

Publication number Publication date
JPH018714Y2 (enrdf_load_stackoverflow) 1989-03-08

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