JPS62170547U - - Google Patents

Info

Publication number
JPS62170547U
JPS62170547U JP5983386U JP5983386U JPS62170547U JP S62170547 U JPS62170547 U JP S62170547U JP 5983386 U JP5983386 U JP 5983386U JP 5983386 U JP5983386 U JP 5983386U JP S62170547 U JPS62170547 U JP S62170547U
Authority
JP
Japan
Prior art keywords
chamber
cleaning
airtightness
gas
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5983386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247472Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5983386U priority Critical patent/JPH0247472Y2/ja
Publication of JPS62170547U publication Critical patent/JPS62170547U/ja
Application granted granted Critical
Publication of JPH0247472Y2 publication Critical patent/JPH0247472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP5983386U 1986-04-21 1986-04-21 Expired JPH0247472Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5983386U JPH0247472Y2 (enrdf_load_stackoverflow) 1986-04-21 1986-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5983386U JPH0247472Y2 (enrdf_load_stackoverflow) 1986-04-21 1986-04-21

Publications (2)

Publication Number Publication Date
JPS62170547U true JPS62170547U (enrdf_load_stackoverflow) 1987-10-29
JPH0247472Y2 JPH0247472Y2 (enrdf_load_stackoverflow) 1990-12-13

Family

ID=30891696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5983386U Expired JPH0247472Y2 (enrdf_load_stackoverflow) 1986-04-21 1986-04-21

Country Status (1)

Country Link
JP (1) JPH0247472Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254140A (ja) * 1988-07-20 1990-02-23 Expertek Inc 流体包有室の漏れを検出する装置および方法
JP2009071570A (ja) * 2007-09-13 2009-04-02 Epson Toyocom Corp 圧電振動子の気密検査装置及び気密検査方法
JP2009198431A (ja) * 2008-02-25 2009-09-03 Kayaba Ind Co Ltd 漏れ検査装置および漏れ検査方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254140A (ja) * 1988-07-20 1990-02-23 Expertek Inc 流体包有室の漏れを検出する装置および方法
JP2009071570A (ja) * 2007-09-13 2009-04-02 Epson Toyocom Corp 圧電振動子の気密検査装置及び気密検査方法
JP2009198431A (ja) * 2008-02-25 2009-09-03 Kayaba Ind Co Ltd 漏れ検査装置および漏れ検査方法

Also Published As

Publication number Publication date
JPH0247472Y2 (enrdf_load_stackoverflow) 1990-12-13

Similar Documents

Publication Publication Date Title
JPS62170547U (enrdf_load_stackoverflow)
CN212297235U (zh) 一种气压式自动扶手
JPS6444443U (enrdf_load_stackoverflow)
JPS62170546U (enrdf_load_stackoverflow)
JPS6427639U (enrdf_load_stackoverflow)
JPS5857940U (ja) リ−ク検査装置
JPH0283024U (enrdf_load_stackoverflow)
JPS61169944U (enrdf_load_stackoverflow)
JPS56157832A (en) Method and instrument for testing airtightness of storage battery
JPH0171438U (enrdf_load_stackoverflow)
JPS6420267U (enrdf_load_stackoverflow)
JPS63182526U (enrdf_load_stackoverflow)
JPS6389480U (enrdf_load_stackoverflow)
JPH02131245U (enrdf_load_stackoverflow)
JPS6312152U (enrdf_load_stackoverflow)
JPS61170066U (enrdf_load_stackoverflow)
JPS6218673U (enrdf_load_stackoverflow)
JPS63118333U (enrdf_load_stackoverflow)
JPS63139490U (enrdf_load_stackoverflow)
JPH01134782U (enrdf_load_stackoverflow)
JPH01146566U (enrdf_load_stackoverflow)
JPS61106024U (enrdf_load_stackoverflow)
JPH02111700U (enrdf_load_stackoverflow)
JPS61168630U (enrdf_load_stackoverflow)
JPS59182340U (ja) 高圧蒸気式滅菌装置