JPS63938B2 - - Google Patents

Info

Publication number
JPS63938B2
JPS63938B2 JP54090601A JP9060179A JPS63938B2 JP S63938 B2 JPS63938 B2 JP S63938B2 JP 54090601 A JP54090601 A JP 54090601A JP 9060179 A JP9060179 A JP 9060179A JP S63938 B2 JPS63938 B2 JP S63938B2
Authority
JP
Japan
Prior art keywords
substrate
chamber
growth
preliminary
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54090601A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5615031A (en
Inventor
Seiichi Nagata
Tsuneo Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9060179A priority Critical patent/JPS5615031A/ja
Publication of JPS5615031A publication Critical patent/JPS5615031A/ja
Publication of JPS63938B2 publication Critical patent/JPS63938B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP9060179A 1979-07-17 1979-07-17 Molecular beam epitaxial growing apparatus Granted JPS5615031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9060179A JPS5615031A (en) 1979-07-17 1979-07-17 Molecular beam epitaxial growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9060179A JPS5615031A (en) 1979-07-17 1979-07-17 Molecular beam epitaxial growing apparatus

Publications (2)

Publication Number Publication Date
JPS5615031A JPS5615031A (en) 1981-02-13
JPS63938B2 true JPS63938B2 (enrdf_load_stackoverflow) 1988-01-09

Family

ID=14002984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9060179A Granted JPS5615031A (en) 1979-07-17 1979-07-17 Molecular beam epitaxial growing apparatus

Country Status (1)

Country Link
JP (1) JPS5615031A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207331A (en) * 1981-06-15 1982-12-20 Canon Inc Manufacture of semiconductor device
US4508590A (en) * 1983-09-16 1985-04-02 Raphael Kaplan Method for the deposition of high-quality crystal epitaxial films of iron
JPS6183699A (ja) * 1984-09-28 1986-04-28 Hitachi Ltd 分子線エピタキシ装置
JPH035395A (ja) * 1989-05-31 1991-01-11 Hitachi Ltd Ｍｂｅ装置及びその運転方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3404661A (en) * 1965-08-26 1968-10-08 Sperry Rand Corp Evaporation system

Also Published As

Publication number Publication date
JPS5615031A (en) 1981-02-13

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