JPH0353276B2 - - Google Patents

Info

Publication number
JPH0353276B2
JPH0353276B2 JP26549187A JP26549187A JPH0353276B2 JP H0353276 B2 JPH0353276 B2 JP H0353276B2 JP 26549187 A JP26549187 A JP 26549187A JP 26549187 A JP26549187 A JP 26549187A JP H0353276 B2 JPH0353276 B2 JP H0353276B2
Authority
JP
Japan
Prior art keywords
crystal growth
gas adsorption
gate valve
chamber
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26549187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01108199A (ja
Inventor
Takeshi Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP26549187A priority Critical patent/JPH01108199A/ja
Publication of JPH01108199A publication Critical patent/JPH01108199A/ja
Publication of JPH0353276B2 publication Critical patent/JPH0353276B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP26549187A 1987-10-22 1987-10-22 分子線結晶成長装置 Granted JPH01108199A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26549187A JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26549187A JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Publications (2)

Publication Number Publication Date
JPH01108199A JPH01108199A (ja) 1989-04-25
JPH0353276B2 true JPH0353276B2 (enrdf_load_stackoverflow) 1991-08-14

Family

ID=17417920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26549187A Granted JPH01108199A (ja) 1987-10-22 1987-10-22 分子線結晶成長装置

Country Status (1)

Country Link
JP (1) JPH01108199A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01108199A (ja) 1989-04-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term