JPS639249B2 - - Google Patents

Info

Publication number
JPS639249B2
JPS639249B2 JP53053023A JP5302378A JPS639249B2 JP S639249 B2 JPS639249 B2 JP S639249B2 JP 53053023 A JP53053023 A JP 53053023A JP 5302378 A JP5302378 A JP 5302378A JP S639249 B2 JPS639249 B2 JP S639249B2
Authority
JP
Japan
Prior art keywords
elements
small holes
flow rate
pulse motor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53053023A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54144578A (en
Inventor
Noboru Tominari
Takashi Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mikuni Corp
Original Assignee
Mikuni Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corp filed Critical Mikuni Corp
Priority to JP5302378A priority Critical patent/JPS54144578A/ja
Publication of JPS54144578A publication Critical patent/JPS54144578A/ja
Publication of JPS639249B2 publication Critical patent/JPS639249B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Magnetically Actuated Valves (AREA)
  • Flow Control (AREA)
JP5302378A 1978-05-02 1978-05-02 Flow rate control mechanism Granted JPS54144578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5302378A JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5302378A JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Publications (2)

Publication Number Publication Date
JPS54144578A JPS54144578A (en) 1979-11-10
JPS639249B2 true JPS639249B2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=12931286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5302378A Granted JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Country Status (1)

Country Link
JP (1) JPS54144578A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223383U (enrdf_load_stackoverflow) * 1988-07-29 1990-02-15

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213928A (ja) * 1983-05-19 1984-12-03 Mitsubishi Heavy Ind Ltd 燃料制御弁
JPS6412185A (en) * 1987-07-02 1989-01-17 Matsushita Electric Ind Co Ltd Motor-driven valve
JPS6415581A (en) * 1987-07-08 1989-01-19 Matsushita Electric Ind Co Ltd Motor-operated valve
JP2574308B2 (ja) * 1987-07-10 1997-01-22 松下電器産業株式会社 電動弁
JPH0198779A (ja) * 1987-10-09 1989-04-17 Matsushita Electric Ind Co Ltd 電動弁
JPH0592237U (ja) * 1992-05-20 1993-12-17 株式会社明星金属工業所 ロータリーバルブ式スピードコントローラー付ニューマチックコンベアー
JPH0595931U (ja) * 1992-05-27 1993-12-27 株式会社明星金属工業所 ニューマチックコンベアーに於けるロータリーバルブ式スピードコントローラー
US7690396B2 (en) * 2006-07-20 2010-04-06 Baxter International Inc. Multirate tubing flow restrictor
JP6324870B2 (ja) * 2014-10-08 2018-05-16 東京エレクトロン株式会社 ガス供給機構及び半導体製造装置
CN110701319B (zh) * 2019-09-30 2020-11-17 清华大学 涡流驱动阀门

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638967B2 (enrdf_load_stackoverflow) * 1972-08-04 1981-09-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223383U (enrdf_load_stackoverflow) * 1988-07-29 1990-02-15

Also Published As

Publication number Publication date
JPS54144578A (en) 1979-11-10

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