JPS54144578A - Flow rate control mechanism - Google Patents

Flow rate control mechanism

Info

Publication number
JPS54144578A
JPS54144578A JP5302378A JP5302378A JPS54144578A JP S54144578 A JPS54144578 A JP S54144578A JP 5302378 A JP5302378 A JP 5302378A JP 5302378 A JP5302378 A JP 5302378A JP S54144578 A JPS54144578 A JP S54144578A
Authority
JP
Japan
Prior art keywords
disc
fluid
casing
flow rate
control mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5302378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639249B2 (enrdf_load_stackoverflow
Inventor
Noboru Tominari
Takatsugu Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mikuni Corp
Original Assignee
Mikuni Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corp filed Critical Mikuni Corp
Priority to JP5302378A priority Critical patent/JPS54144578A/ja
Publication of JPS54144578A publication Critical patent/JPS54144578A/ja
Publication of JPS639249B2 publication Critical patent/JPS639249B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Magnetically Actuated Valves (AREA)
JP5302378A 1978-05-02 1978-05-02 Flow rate control mechanism Granted JPS54144578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5302378A JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5302378A JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Publications (2)

Publication Number Publication Date
JPS54144578A true JPS54144578A (en) 1979-11-10
JPS639249B2 JPS639249B2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=12931286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5302378A Granted JPS54144578A (en) 1978-05-02 1978-05-02 Flow rate control mechanism

Country Status (1)

Country Link
JP (1) JPS54144578A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213928A (ja) * 1983-05-19 1984-12-03 Mitsubishi Heavy Ind Ltd 燃料制御弁
JPS6412185A (en) * 1987-07-02 1989-01-17 Matsushita Electric Industrial Co Ltd Motor-driven valve
JPS6415581A (en) * 1987-07-08 1989-01-19 Matsushita Electric Industrial Co Ltd Motor-operated valve
JPS6415583A (en) * 1987-07-10 1989-01-19 Matsushita Electric Industrial Co Ltd Motor-operated valve
JPH0198779A (ja) * 1987-10-09 1989-04-17 Matsushita Electric Ind Co Ltd 電動弁
JPH0592237U (ja) * 1992-05-20 1993-12-17 株式会社明星金属工業所 ロータリーバルブ式スピードコントローラー付ニューマチックコンベアー
JPH0595931U (ja) * 1992-05-27 1993-12-27 株式会社明星金属工業所 ニューマチックコンベアーに於けるロータリーバルブ式スピードコントローラー
JP2009545028A (ja) * 2006-07-20 2009-12-17 バクスター・インターナショナル・インコーポレイテッド マルチレートチューブ流量制限器
WO2016056390A1 (ja) * 2014-10-08 2016-04-14 東京エレクトロン株式会社 ガス供給機構及び半導体製造装置
CN110701319A (zh) * 2019-09-30 2020-01-17 清华大学 涡流驱动阀门

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223383U (enrdf_load_stackoverflow) * 1988-07-29 1990-02-15

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933097A (enrdf_load_stackoverflow) * 1972-08-04 1974-03-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933097A (enrdf_load_stackoverflow) * 1972-08-04 1974-03-26

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213928A (ja) * 1983-05-19 1984-12-03 Mitsubishi Heavy Ind Ltd 燃料制御弁
JPS6412185A (en) * 1987-07-02 1989-01-17 Matsushita Electric Industrial Co Ltd Motor-driven valve
JPS6415581A (en) * 1987-07-08 1989-01-19 Matsushita Electric Industrial Co Ltd Motor-operated valve
JPS6415583A (en) * 1987-07-10 1989-01-19 Matsushita Electric Industrial Co Ltd Motor-operated valve
JPH0198779A (ja) * 1987-10-09 1989-04-17 Matsushita Electric Ind Co Ltd 電動弁
JPH0592237U (ja) * 1992-05-20 1993-12-17 株式会社明星金属工業所 ロータリーバルブ式スピードコントローラー付ニューマチックコンベアー
JPH0595931U (ja) * 1992-05-27 1993-12-27 株式会社明星金属工業所 ニューマチックコンベアーに於けるロータリーバルブ式スピードコントローラー
JP2009545028A (ja) * 2006-07-20 2009-12-17 バクスター・インターナショナル・インコーポレイテッド マルチレートチューブ流量制限器
WO2016056390A1 (ja) * 2014-10-08 2016-04-14 東京エレクトロン株式会社 ガス供給機構及び半導体製造装置
JP2016076649A (ja) * 2014-10-08 2016-05-12 東京エレクトロン株式会社 ガス供給機構及び半導体製造装置
TWI669768B (zh) * 2014-10-08 2019-08-21 日商東京威力科創股份有限公司 Gas supply mechanism and semiconductor manufacturing device
US10510514B2 (en) 2014-10-08 2019-12-17 Tokyo Electron Limited Gas supply mechanism and semiconductor manufacturing apparatus
CN110701319A (zh) * 2019-09-30 2020-01-17 清华大学 涡流驱动阀门
CN110701319B (zh) * 2019-09-30 2020-11-17 清华大学 涡流驱动阀门

Also Published As

Publication number Publication date
JPS639249B2 (enrdf_load_stackoverflow) 1988-02-26

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