JPS6391156U - - Google Patents
Info
- Publication number
- JPS6391156U JPS6391156U JP18721386U JP18721386U JPS6391156U JP S6391156 U JPS6391156 U JP S6391156U JP 18721386 U JP18721386 U JP 18721386U JP 18721386 U JP18721386 U JP 18721386U JP S6391156 U JPS6391156 U JP S6391156U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- irradiating
- extracting
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721386U JPS6391156U (ko) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721386U JPS6391156U (ko) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391156U true JPS6391156U (ko) | 1988-06-13 |
Family
ID=31137486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18721386U Pending JPS6391156U (ko) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391156U (ko) |
-
1986
- 1986-12-04 JP JP18721386U patent/JPS6391156U/ja active Pending
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