JPS62188052U - - Google Patents
Info
- Publication number
- JPS62188052U JPS62188052U JP7534386U JP7534386U JPS62188052U JP S62188052 U JPS62188052 U JP S62188052U JP 7534386 U JP7534386 U JP 7534386U JP 7534386 U JP7534386 U JP 7534386U JP S62188052 U JPS62188052 U JP S62188052U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- beam deflection
- pair
- utility
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7534386U JPS62188052U (ko) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7534386U JPS62188052U (ko) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188052U true JPS62188052U (ko) | 1987-11-30 |
Family
ID=30921395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7534386U Pending JPS62188052U (ko) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188052U (ko) |
-
1986
- 1986-05-21 JP JP7534386U patent/JPS62188052U/ja active Pending