JPH0258330U - - Google Patents
Info
- Publication number
- JPH0258330U JPH0258330U JP12556488U JP12556488U JPH0258330U JP H0258330 U JPH0258330 U JP H0258330U JP 12556488 U JP12556488 U JP 12556488U JP 12556488 U JP12556488 U JP 12556488U JP H0258330 U JPH0258330 U JP H0258330U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode plates
- edges
- plates
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556488U JPH0258330U (ko) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12556488U JPH0258330U (ko) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0258330U true JPH0258330U (ko) | 1990-04-26 |
Family
ID=31376286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12556488U Pending JPH0258330U (ko) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0258330U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007251014A (ja) * | 2006-03-17 | 2007-09-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
1988
- 1988-09-26 JP JP12556488U patent/JPH0258330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007251014A (ja) * | 2006-03-17 | 2007-09-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |