JPS6271863U - - Google Patents
Info
- Publication number
- JPS6271863U JPS6271863U JP16280385U JP16280385U JPS6271863U JP S6271863 U JPS6271863 U JP S6271863U JP 16280385 U JP16280385 U JP 16280385U JP 16280385 U JP16280385 U JP 16280385U JP S6271863 U JPS6271863 U JP S6271863U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- shutter
- ion
- ion beam
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 239000007943 implant Substances 0.000 claims description 2
- 238000002513 implantation Methods 0.000 claims 4
- 150000002500 ions Chemical class 0.000 claims 4
- 238000005468 ion implantation Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280385U JPS6271863U (ko) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16280385U JPS6271863U (ko) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6271863U true JPS6271863U (ko) | 1987-05-08 |
Family
ID=31090411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16280385U Pending JPS6271863U (ko) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6271863U (ko) |
-
1985
- 1985-10-25 JP JP16280385U patent/JPS6271863U/ja active Pending
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