JPS63110566U - - Google Patents
Info
- Publication number
- JPS63110566U JPS63110566U JP54687U JP54687U JPS63110566U JP S63110566 U JPS63110566 U JP S63110566U JP 54687 U JP54687 U JP 54687U JP 54687 U JP54687 U JP 54687U JP S63110566 U JPS63110566 U JP S63110566U
- Authority
- JP
- Japan
- Prior art keywords
- irradiated
- vacuum
- utility
- irradiation device
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54687U JPS63110566U (ko) | 1987-01-05 | 1987-01-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54687U JPS63110566U (ko) | 1987-01-05 | 1987-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110566U true JPS63110566U (ko) | 1988-07-15 |
Family
ID=30777613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54687U Pending JPS63110566U (ko) | 1987-01-05 | 1987-01-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110566U (ko) |
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1987
- 1987-01-05 JP JP54687U patent/JPS63110566U/ja active Pending