JPH01176925U - - Google Patents
Info
- Publication number
- JPH01176925U JPH01176925U JP7170888U JP7170888U JPH01176925U JP H01176925 U JPH01176925 U JP H01176925U JP 7170888 U JP7170888 U JP 7170888U JP 7170888 U JP7170888 U JP 7170888U JP H01176925 U JPH01176925 U JP H01176925U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- beam processing
- processing device
- extracts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 4
- 150000002500 ions Chemical class 0.000 claims 3
- 239000000284 extract Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170888U JPH01176925U (ko) | 1988-06-01 | 1988-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170888U JPH01176925U (ko) | 1988-06-01 | 1988-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176925U true JPH01176925U (ko) | 1989-12-18 |
Family
ID=31296903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7170888U Pending JPH01176925U (ko) | 1988-06-01 | 1988-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176925U (ko) |
-
1988
- 1988-06-01 JP JP7170888U patent/JPH01176925U/ja active Pending
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