JPS62157968U - - Google Patents
Info
- Publication number
- JPS62157968U JPS62157968U JP4491186U JP4491186U JPS62157968U JP S62157968 U JPS62157968 U JP S62157968U JP 4491186 U JP4491186 U JP 4491186U JP 4491186 U JP4491186 U JP 4491186U JP S62157968 U JPS62157968 U JP S62157968U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- electrode
- thin film
- irradiate
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4491186U JPS62157968U (ko) | 1986-03-28 | 1986-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4491186U JPS62157968U (ko) | 1986-03-28 | 1986-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157968U true JPS62157968U (ko) | 1987-10-07 |
Family
ID=30863167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4491186U Pending JPS62157968U (ko) | 1986-03-28 | 1986-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157968U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163362A (ja) * | 1988-06-10 | 1990-06-22 | Ulvac Corp | 窒化チタン薄膜の形成方法 |
-
1986
- 1986-03-28 JP JP4491186U patent/JPS62157968U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163362A (ja) * | 1988-06-10 | 1990-06-22 | Ulvac Corp | 窒化チタン薄膜の形成方法 |