JPH0455749U - - Google Patents
Info
- Publication number
- JPH0455749U JPH0455749U JP9760790U JP9760790U JPH0455749U JP H0455749 U JPH0455749 U JP H0455749U JP 9760790 U JP9760790 U JP 9760790U JP 9760790 U JP9760790 U JP 9760790U JP H0455749 U JPH0455749 U JP H0455749U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ionization chamber
- ion source
- exit port
- injection gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000956 alloy Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 3
- 239000007924 injection Substances 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9760790U JPH0455749U (ko) | 1990-09-19 | 1990-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9760790U JPH0455749U (ko) | 1990-09-19 | 1990-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455749U true JPH0455749U (ko) | 1992-05-13 |
Family
ID=31838120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9760790U Pending JPH0455749U (ko) | 1990-09-19 | 1990-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455749U (ko) |
-
1990
- 1990-09-19 JP JP9760790U patent/JPH0455749U/ja active Pending
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