JPH0192750U - - Google Patents
Info
- Publication number
- JPH0192750U JPH0192750U JP18876387U JP18876387U JPH0192750U JP H0192750 U JPH0192750 U JP H0192750U JP 18876387 U JP18876387 U JP 18876387U JP 18876387 U JP18876387 U JP 18876387U JP H0192750 U JPH0192750 U JP H0192750U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ion implantation
- carrier
- bake
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18876387U JPH0192750U (ko) | 1987-12-11 | 1987-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18876387U JPH0192750U (ko) | 1987-12-11 | 1987-12-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192750U true JPH0192750U (ko) | 1989-06-19 |
Family
ID=31479836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18876387U Pending JPH0192750U (ko) | 1987-12-11 | 1987-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192750U (ko) |
-
1987
- 1987-12-11 JP JP18876387U patent/JPH0192750U/ja active Pending