JPS6242242U - - Google Patents
Info
- Publication number
- JPS6242242U JPS6242242U JP13481685U JP13481685U JPS6242242U JP S6242242 U JPS6242242 U JP S6242242U JP 13481685 U JP13481685 U JP 13481685U JP 13481685 U JP13481685 U JP 13481685U JP S6242242 U JPS6242242 U JP S6242242U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- susceptor
- arranging
- constructed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13481685U JPS6242242U (ko) | 1985-09-02 | 1985-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13481685U JPS6242242U (ko) | 1985-09-02 | 1985-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6242242U true JPS6242242U (ko) | 1987-03-13 |
Family
ID=31036417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13481685U Pending JPS6242242U (ko) | 1985-09-02 | 1985-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242242U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850533U (ja) * | 1981-10-02 | 1983-04-05 | 株式会社ケンウッド | ダイオ−ドマトリツクス回路 |
-
1985
- 1985-09-02 JP JP13481685U patent/JPS6242242U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850533U (ja) * | 1981-10-02 | 1983-04-05 | 株式会社ケンウッド | ダイオ−ドマトリツクス回路 |