JPH0211325U - - Google Patents
Info
- Publication number
- JPH0211325U JPH0211325U JP8979088U JP8979088U JPH0211325U JP H0211325 U JPH0211325 U JP H0211325U JP 8979088 U JP8979088 U JP 8979088U JP 8979088 U JP8979088 U JP 8979088U JP H0211325 U JPH0211325 U JP H0211325U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding
- holding pins
- wafer cleaning
- outer frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000004080 punching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8979088U JPH0211325U (ko) | 1988-07-06 | 1988-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8979088U JPH0211325U (ko) | 1988-07-06 | 1988-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0211325U true JPH0211325U (ko) | 1990-01-24 |
Family
ID=31314328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8979088U Pending JPH0211325U (ko) | 1988-07-06 | 1988-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0211325U (ko) |
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1988
- 1988-07-06 JP JP8979088U patent/JPH0211325U/ja active Pending