JPS6175128U - - Google Patents
Info
- Publication number
- JPS6175128U JPS6175128U JP16073784U JP16073784U JPS6175128U JP S6175128 U JPS6175128 U JP S6175128U JP 16073784 U JP16073784 U JP 16073784U JP 16073784 U JP16073784 U JP 16073784U JP S6175128 U JPS6175128 U JP S6175128U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- semiconductor wafer
- pins protruding
- support
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16073784U JPS6175128U (ko) | 1984-10-23 | 1984-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16073784U JPS6175128U (ko) | 1984-10-23 | 1984-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175128U true JPS6175128U (ko) | 1986-05-21 |
Family
ID=30718656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16073784U Pending JPS6175128U (ko) | 1984-10-23 | 1984-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175128U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6091640A (ja) * | 1983-10-25 | 1985-05-23 | Mitsutoyo Mfg Co Ltd | ウエハの位置決め装置 |
-
1984
- 1984-10-23 JP JP16073784U patent/JPS6175128U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6091640A (ja) * | 1983-10-25 | 1985-05-23 | Mitsutoyo Mfg Co Ltd | ウエハの位置決め装置 |