JPS62184747U - - Google Patents
Info
- Publication number
- JPS62184747U JPS62184747U JP7416886U JP7416886U JPS62184747U JP S62184747 U JPS62184747 U JP S62184747U JP 7416886 U JP7416886 U JP 7416886U JP 7416886 U JP7416886 U JP 7416886U JP S62184747 U JPS62184747 U JP S62184747U
- Authority
- JP
- Japan
- Prior art keywords
- side plate
- sides
- basket
- wafers
- electronic transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 4
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7416886U JPS62184747U (ko) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7416886U JPS62184747U (ko) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184747U true JPS62184747U (ko) | 1987-11-24 |
Family
ID=30919138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7416886U Pending JPS62184747U (ko) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184747U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100993185B1 (ko) * | 2010-03-30 | 2010-11-09 | 이프로링크텍(주) | Ｌｅｄ 공정용 카세트 |
-
1986
- 1986-05-15 JP JP7416886U patent/JPS62184747U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100993185B1 (ko) * | 2010-03-30 | 2010-11-09 | 이프로링크텍(주) | Ｌｅｄ 공정용 카세트 |
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