JPS62184747U

JPS62184747U -

Info

Publication number: JPS62184747U
Application number: JP7416886U
Authority: JP
Priority date: 1986-05-15
Filing date: 1986-05-15
Publication date: 1987-11-24

Description

[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す斜視図、第
２図、第３図はこの考案の他の実施例を示す斜視
図、第４図は従来のバスケツトと検移表を示す斜
視図である。図中、１はバスケツト、１ａは側板、３は電子
検移表、４，５，６は支持具である。尚、図中同
一符号は同一または相当部分を示す。 Fig. 1 is a perspective view showing one embodiment of this invention, Figs. 2 and 3 are perspective views showing other embodiments of this invention, and Fig. 4 is a perspective view showing a conventional basket and transfer table. It is. In the figure, 1 is a basket, 1a is a side plate, 3 is an electronic transfer chart, and 4, 5, and 6 are supports. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims

[Scope of Claim for Utility Model Registration] (1) A semiconductor device in which a test table support is installed on the side plate of a basket that holds and stores wafers at a certain interval, and an electronic test table is detachably attached to the support. Basket for wafers. (2) The semiconductor wafer basket according to claim 1, wherein the edges on both sides of the electronic transfer chart are fitted into a pair of gutter-like supports arranged on both sides of the side plate. (3) The semiconductor wafer basket according to claim 1, wherein the hook-shaped support protruding from the top of the side plate is hooked into a through hole provided at the top of the electronic transfer table. (4) Scope of Utility Model Registration Claim 1, Paragraph 1, in which the notches provided on both sides of the top of the electronic transfer table are fitted into a pair of hook-shaped supports protruding from both sides of the top of the side plate to suspend it. Basket for semiconductor wafers as described.