JPS61136543U - - Google Patents
Info
- Publication number
- JPS61136543U JPS61136543U JP1835785U JP1835785U JPS61136543U JP S61136543 U JPS61136543 U JP S61136543U JP 1835785 U JP1835785 U JP 1835785U JP 1835785 U JP1835785 U JP 1835785U JP S61136543 U JPS61136543 U JP S61136543U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inclined groove
- wafer carrier
- transfer device
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1835785U JPS61136543U (ko) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1835785U JPS61136543U (ko) | 1985-02-14 | 1985-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136543U true JPS61136543U (ko) | 1986-08-25 |
Family
ID=30506918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1835785U Pending JPS61136543U (ko) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136543U (ko) |
-
1985
- 1985-02-14 JP JP1835785U patent/JPS61136543U/ja active Pending
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