JPH01169028U - - Google Patents
Info
- Publication number
- JPH01169028U JPH01169028U JP6482688U JP6482688U JPH01169028U JP H01169028 U JPH01169028 U JP H01169028U JP 6482688 U JP6482688 U JP 6482688U JP 6482688 U JP6482688 U JP 6482688U JP H01169028 U JPH01169028 U JP H01169028U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- heater
- semiconductor manufacturing
- reaction chamber
- device characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6482688U JPH01169028U (ko) | 1988-05-17 | 1988-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6482688U JPH01169028U (ko) | 1988-05-17 | 1988-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01169028U true JPH01169028U (ko) | 1989-11-29 |
Family
ID=31290282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6482688U Pending JPH01169028U (ko) | 1988-05-17 | 1988-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01169028U (ko) |
-
1988
- 1988-05-17 JP JP6482688U patent/JPH01169028U/ja active Pending