JPS62109344U - - Google Patents
Info
- Publication number
- JPS62109344U JPS62109344U JP19954385U JP19954385U JPS62109344U JP S62109344 U JPS62109344 U JP S62109344U JP 19954385 U JP19954385 U JP 19954385U JP 19954385 U JP19954385 U JP 19954385U JP S62109344 U JPS62109344 U JP S62109344U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- shield plate
- facing
- transparent window
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000007943 implant Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19954385U JPS62109344U (ko) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19954385U JPS62109344U (ko) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62109344U true JPS62109344U (ko) | 1987-07-13 |
Family
ID=31161265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19954385U Pending JPS62109344U (ko) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109344U (ko) |
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1985
- 1985-12-27 JP JP19954385U patent/JPS62109344U/ja active Pending