JPS62186364U - - Google Patents
Info
- Publication number
- JPS62186364U JPS62186364U JP7269186U JP7269186U JPS62186364U JP S62186364 U JPS62186364 U JP S62186364U JP 7269186 U JP7269186 U JP 7269186U JP 7269186 U JP7269186 U JP 7269186U JP S62186364 U JPS62186364 U JP S62186364U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- ion
- ion source
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7269186U JPS62186364U (ko) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7269186U JPS62186364U (ko) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186364U true JPS62186364U (ko) | 1987-11-27 |
Family
ID=30916367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7269186U Pending JPS62186364U (ko) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186364U (ko) |
-
1986
- 1986-05-16 JP JP7269186U patent/JPS62186364U/ja active Pending
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