JPH0231125U - - Google Patents
Info
- Publication number
- JPH0231125U JPH0231125U JP10875688U JP10875688U JPH0231125U JP H0231125 U JPH0231125 U JP H0231125U JP 10875688 U JP10875688 U JP 10875688U JP 10875688 U JP10875688 U JP 10875688U JP H0231125 U JPH0231125 U JP H0231125U
- Authority
- JP
- Japan
- Prior art keywords
- doping
- ion
- ion generation
- semiconductor wafer
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875688U JPH0231125U (ko) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875688U JPH0231125U (ko) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231125U true JPH0231125U (ko) | 1990-02-27 |
Family
ID=31344390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10875688U Pending JPH0231125U (ko) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231125U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140101656A (ko) * | 2013-02-11 | 2014-08-20 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 처리 장치, 이온 주입 장치 및 이온 주입 방법 |
-
1988
- 1988-08-19 JP JP10875688U patent/JPH0231125U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140101656A (ko) * | 2013-02-11 | 2014-08-20 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 처리 장치, 이온 주입 장치 및 이온 주입 방법 |