JPS62158758U - - Google Patents
Info
- Publication number
- JPS62158758U JPS62158758U JP4594186U JP4594186U JPS62158758U JP S62158758 U JPS62158758 U JP S62158758U JP 4594186 U JP4594186 U JP 4594186U JP 4594186 U JP4594186 U JP 4594186U JP S62158758 U JPS62158758 U JP S62158758U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- sample
- detectors
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4594186U JPS62158758U (ko) | 1986-03-28 | 1986-03-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4594186U JPS62158758U (ko) | 1986-03-28 | 1986-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62158758U true JPS62158758U (ko) | 1987-10-08 |
Family
ID=30865141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4594186U Pending JPS62158758U (ko) | 1986-03-28 | 1986-03-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62158758U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03165438A (ja) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | 荷電粒子線装置 |
-
1986
- 1986-03-28 JP JP4594186U patent/JPS62158758U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03165438A (ja) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | 荷電粒子線装置 |
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