JPS6389962U - - Google Patents
Info
- Publication number
- JPS6389962U JPS6389962U JP18527286U JP18527286U JPS6389962U JP S6389962 U JPS6389962 U JP S6389962U JP 18527286 U JP18527286 U JP 18527286U JP 18527286 U JP18527286 U JP 18527286U JP S6389962 U JPS6389962 U JP S6389962U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- auxiliary
- gear
- main
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案実施例の真空蒸着装置の模式断
面図、第２図は従来の真空蒸着装置の模式断面図
である。
１……取り出し棒、２……扉、３……予備室、
４……仕切板、５……試料台、６……試料、７…
…補助ベルジヤー、８……シヤツター、９……蒸
着源、１０……主ベルジヤー、１１……ルツボ、
１２……冷却パイプ、１３……凹部。
FIG. 1 is a schematic sectional view of a vacuum evaporation apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic sectional view of a conventional vacuum evaporation apparatus. 1... Take-out rod, 2... Door, 3... Spare room,
4... Partition plate, 5... Sample stand, 6... Sample, 7...
...Auxiliary bell gear, 8... Shutter, 9... Evaporation source, 10... Main bell gear, 11... Crucible,
12...Cooling pipe, 13...Recess.
Claims (1)
られ蒸着源を配する凹部を有するルツボと、この
ルツボ上に設けられ蒸着を遮蔽するためのシヤツ
ターと、前記主ベルジヤーの上部に設置され仕切
板によつて仕切られる予備室を備える補助ベルジ
ヤーと、この補助ベルジヤー内に設けられ試料が
設置される試料台と、前記補助ベルジヤーの開口
に設けられ取り出し棒を備える扉と、からなるこ
とを特徴とする真空蒸着装置。 ２ 前記補助ベルジヤーは前記主ベルジヤーに対
して着脱自在であることを特徴とする実用新案登
録請求の範囲第１項に記載の真空蒸着装置。[Claims for Utility Model Registration] 1. A main bell gear, a crucible provided in the main bell gear and having a concave portion in which a vapor deposition source is placed, a shutter provided on the crucible for shielding vapor deposition, and a main bell gear provided in the main bell gear. an auxiliary bell gear equipped with an auxiliary chamber installed at the upper part and partitioned by a partition plate; a sample stand provided within the auxiliary bell gear and on which a sample is placed; and a door provided at the opening of the auxiliary bell gear and equipped with a take-out rod; A vacuum evaporation device characterized by comprising: 2. The vacuum evaporation apparatus according to claim 1, wherein the auxiliary bell gear is detachable from the main bell gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18527286U JPS6389962U (en) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18527286U JPS6389962U (en) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389962U true JPS6389962U (en) | 1988-06-10 |
Family
ID=31133743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18527286U Pending JPS6389962U (en) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389962U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02109299A (en) * | 1988-10-18 | 1990-04-20 | Mitsubishi Electric Corp | X-ray generator of lazor excitation type |
-
1986
- 1986-12-01 JP JP18527286U patent/JPS6389962U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02109299A (en) * | 1988-10-18 | 1990-04-20 | Mitsubishi Electric Corp | X-ray generator of lazor excitation type |