JPS6389243U - - Google Patents
Info
- Publication number
- JPS6389243U JPS6389243U JP18472086U JP18472086U JPS6389243U JP S6389243 U JPS6389243 U JP S6389243U JP 18472086 U JP18472086 U JP 18472086U JP 18472086 U JP18472086 U JP 18472086U JP S6389243 U JPS6389243 U JP S6389243U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- end station
- semiconductor substrate
- roll
- möbius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Description
第１図はこの考案にかかるベルト式エンドステ
ーシヨン部分の斜視図であり、第２図はこの考案
にかかるベルト式エンドステーシヨンで使用する
ロールの斜視図である。第３図は従来のエンドス
テーシヨンの斜視図である。
１……ベルト、２……半導体基板、３……ロー
ル、４……イオン注入方向。
FIG. 1 is a perspective view of a belt-type end station according to this invention, and FIG. 2 is a perspective view of a roll used in the belt-type end station according to this invention. FIG. 3 is a perspective view of a conventional end station. 1...Belt, 2...Semiconductor substrate, 3...Roll, 4...Ion implantation direction.
Claims (1)
オン化した不純物を注入する半導体製造装置のエ
ンドステーシヨンにおいて、前記半導体基板を配
置したベルトをメビウスの輪とすると共に該ベル
トに回転接触するロール内側を空間としたことを
特徴とするベルト式エンドステーシヨン。 In an end station of a semiconductor manufacturing device in which ionized impurities are injected while rotating a semiconductor substrate placed on a belt, the belt on which the semiconductor substrate is placed is made into a Möbius ring, and the inside of the roll that rotates in contact with the belt is made into a space. A belt-type end station characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472086U JPS6389243U (en) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472086U JPS6389243U (en) | 1986-11-29 | 1986-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389243U true JPS6389243U (en) | 1988-06-10 |
Family
ID=31132662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18472086U Pending JPS6389243U (en) | 1986-11-29 | 1986-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389243U (en) |
-
1986
- 1986-11-29 JP JP18472086U patent/JPS6389243U/ja active Pending