JPS6253272U - - Google Patents
Info
- Publication number
- JPS6253272U JPS6253272U JP14511585U JP14511585U JPS6253272U JP S6253272 U JPS6253272 U JP S6253272U JP 14511585 U JP14511585 U JP 14511585U JP 14511585 U JP14511585 U JP 14511585U JP S6253272 U JPS6253272 U JP S6253272U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- belt
- conveyance
- cassette
- pulley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Pile Receivers (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Description
第１図は本考案の一実施例を示す側面図、第２
図はその正面図、第３図は従来のペルト搬送状態
を示す正面図である。
１……試料、２……カセツト、３……プーリー
、４……回転軸、５……ベルト。
Figure 1 is a side view showing one embodiment of the present invention;
The figure is a front view thereof, and FIG. 3 is a front view showing a conventional pelt conveying state. 1... Sample, 2... Cassette, 3... Pulley, 4... Rotating shaft, 5... Belt.
Claims (1)
、試料をカセツトに搬入するベルトの最終端のプ
ーリーの形状を偏心状としたことを特徴とする試
料搬送装置。 1. A sample conveyance device in which a pulley at the final end of a belt for carrying a sample into a cassette has an eccentric shape in belt conveyance of a sample in semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511585U JPS6253272U (en) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511585U JPS6253272U (en) | 1985-09-25 | 1985-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6253272U true JPS6253272U (en) | 1987-04-02 |
Family
ID=31056353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14511585U Pending JPS6253272U (en) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6253272U (en) |
-
1985
- 1985-09-25 JP JP14511585U patent/JPS6253272U/ja active Pending