JPS6384946U - - Google Patents
Info
- Publication number
- JPS6384946U JPS6384946U JP17955386U JP17955386U JPS6384946U JP S6384946 U JPS6384946 U JP S6384946U JP 17955386 U JP17955386 U JP 17955386U JP 17955386 U JP17955386 U JP 17955386U JP S6384946 U JPS6384946 U JP S6384946U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- conductive
- supporting
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Description
第１図は本考案に係るプローブカードを示す一
部断面部分を含む正面図、第２図は第１図の要部
拡大平面図、第３図は従来の半導体ウエハ検査装
置を示す平面図、第４図は第３図の要部拡大平面
図、第５図は第４図の一部断面部分を含む正面図
、第６図は従来の２段式プローブカードを示す平
面図、第７図は第６図の一部断面部分を含む正面
図である。
１……半導体ウエハ（ウエハ）、２……半導体
素子、９……電極パツド、２１……第１のプロー
ブカード、２２……第１の導電性測子、２８……
第２のプローブカード、２９……第２の導電性測
子、３４……プローブカード。
FIG. 1 is a front view including a partial cross section showing a probe card according to the present invention, FIG. 2 is an enlarged plan view of the main part of FIG. 1, and FIG. 3 is a plan view showing a conventional semiconductor wafer inspection apparatus. Fig. 4 is an enlarged plan view of the main part of Fig. 3, Fig. 5 is a front view including a partial cross section of Fig. 4, Fig. 6 is a plan view showing a conventional two-stage probe card, Fig. 7 6 is a front view including a partial cross section of FIG. 6. FIG. DESCRIPTION OF SYMBOLS 1... Semiconductor wafer (wafer), 2... Semiconductor element, 9... Electrode pad, 21... First probe card, 22... First conductive probe, 28...
Second probe card, 29... Second conductive probe, 34... Probe card.
Claims (1)
ウエハ上の電極パツドに接触する第１の導電性測
子が複数本支持された第１のプローブカードと、
該第１のプローブカードの上方に配置され、上記
第１の導電性測子の内側に配設される第２の導電
性測子が複数本支持された第２のプローブカード
とで構成されたプローブカードに於いて、 上記第２のプローブカードを第１のプローブカ
ードに対して水平面内のＸ・Ｙ方向及び上下方向
に移動可能に配設したことを特徴とするプローブ
カード。[Claims for Utility Model Registration] A first probe card supporting a plurality of first conductive probes that contact electrode pads on a semiconductor wafer on which a large number of semiconductor elements are collectively formed;
a second probe card disposed above the first probe card and supporting a plurality of second conductive probes disposed inside the first conductive probe; A probe card characterized in that the second probe card is disposed so as to be movable in the X and Y directions and in the vertical direction in a horizontal plane with respect to the first probe card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955386U JPH0341466Y2 (en) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955386U JPH0341466Y2 (en) | 1986-11-20 | 1986-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6384946U true JPS6384946U (en) | 1988-06-03 |
| JPH0341466Y2 JPH0341466Y2 (en) | 1991-08-30 |
Family
ID=31122716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17955386U Expired JPH0341466Y2 (en) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341466Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082528A1 (en) * | 2001-04-04 | 2002-10-17 | Fujitsu Limited | Contactor device for semiconductor device and method of testing semiconductor device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110023773B (en) * | 2017-02-22 | 2022-03-01 | 新东工业株式会社 | Test system |
-
1986
- 1986-11-20 JP JP17955386U patent/JPH0341466Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002082528A1 (en) * | 2001-04-04 | 2002-10-17 | Fujitsu Limited | Contactor device for semiconductor device and method of testing semiconductor device |
| JPWO2002082528A1 (en) * | 2001-04-04 | 2004-07-29 | 富士通株式会社 | Contactor device for semiconductor device and method for testing semiconductor device |
| JP4794808B2 (en) * | 2001-04-04 | 2011-10-19 | 富士通セミコンダクター株式会社 | Contactor device for semiconductor device and test method of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341466Y2 (en) | 1991-08-30 |