JPS61164039U - - Google Patents

Info

Publication number
JPS61164039U
JPS61164039U JP4842085U JP4842085U JPS61164039U JP S61164039 U JPS61164039 U JP S61164039U JP 4842085 U JP4842085 U JP 4842085U JP 4842085 U JP4842085 U JP 4842085U JP S61164039 U JPS61164039 U JP S61164039U
Authority
JP
Japan
Prior art keywords
needle
probe card
wafer
spring member
impact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4842085U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4842085U priority Critical patent/JPS61164039U/ja
Publication of JPS61164039U publication Critical patent/JPS61164039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案実施例の断面図、第２図は従来
の実施例を示す断面図である。 １……プローブカード、２Ａ……スプリング部
材を用いた針、２……従来の針、３……ウエハー
、４……パツド。 FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional embodiment. 1...Probe card, 2A...needle using a spring member, 2... conventional needle, 3... wafer, 4... pad.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体製造に用いるＩＣ検査工程で使用するプ
ローバーのプローブカードにおいて、スプリング
部材等の緩衝材を針の中間部に設けることにより
、針によるウエハーへの衝撃を緩和しながら電気
的接続をとることを特徴とするプローブカード。 In the probe card of a prober used in the IC inspection process used in semiconductor manufacturing, a shock absorbing material such as a spring member is provided in the middle of the needle to reduce the impact of the needle on the wafer while establishing electrical connection. probe card.
JP4842085U 1985-04-01 1985-04-01 Pending JPS61164039U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4842085U JPS61164039U (en) 1985-04-01 1985-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4842085U JPS61164039U (en) 1985-04-01 1985-04-01

Publications (1)

Publication Number Publication Date
JPS61164039U true JPS61164039U (en) 1986-10-11

Family

ID=30564657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4842085U Pending JPS61164039U (en) 1985-04-01 1985-04-01

Country Status (1)

Country Link
JP (1) JPS61164039U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9217363B2 (en) 2008-08-05 2015-12-22 Vandyne Superturbo, Inc. Super-turbocharger having a high speed traction drive and a continuously variable transmission

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9217363B2 (en) 2008-08-05 2015-12-22 Vandyne Superturbo, Inc. Super-turbocharger having a high speed traction drive and a continuously variable transmission
US9581078B2 (en) 2008-08-05 2017-02-28 Vandyne Superturbo, Inc. Super-turbocharger having a high speed traction drive and a continuously variable transmission

Similar Documents

Publication Publication Date Title
JPS61164039U (en)
JPH0481067U (en)
JPH0371573U (en)
JPS5931050U (en) pin type grip
JPS6343435U (en)
JPS6399279U (en)
JPS63164225U (en)
JPH0332440U (en)
JPH0316069U (en)
JPS62173063U (en)
JPH0372377U (en)
JPH0463133U (en)
JPS6355175U (en)
JPS58164236U (en) Semiconductor wafer characteristic measurement equipment
JPH0390081U (en)
JPS6398633U (en)
JPS63195276U (en)
JPH02146441U (en)
JPS6363772U (en)
JPS621982U (en)
JPS62197280U (en)
JPS6184874U (en)
JPS59140442U (en) Marking equipment for semiconductor devices
JPH02150788U (en)
JPS61186231U (en)