JPS6384572U - - Google Patents
Info
- Publication number
- JPS6384572U JPS6384572U JP17991286U JP17991286U JPS6384572U JP S6384572 U JPS6384572 U JP S6384572U JP 17991286 U JP17991286 U JP 17991286U JP 17991286 U JP17991286 U JP 17991286U JP S6384572 U JPS6384572 U JP S6384572U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- tip
- electrode pad
- brought
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011111 cardboard Substances 0.000 description 1
Description
第１図は本考案の一実施例の探針を測定すべき
半導体ウエーハの電極パツドと接触させた状態を
示す断面図、第２図は従来の探針を測定半導体ウ
エーハの電極パツドと接触させた状態を示す断面
図である。
１，１１……探針、２……プローブカード基板
、３……半導体ウエーハ、４……電極パツド。
Fig. 1 is a sectional view showing a state in which a probe according to an embodiment of the present invention is brought into contact with an electrode pad of a semiconductor wafer to be measured, and Fig. 2 is a sectional view showing a state in which a conventional probe is brought into contact with an electrode pad of a semiconductor wafer to be measured. FIG. 1, 11... Probe, 2... Probe card board, 3... Semiconductor wafer, 4... Electrode pad.
Claims (1)
極パツドに接触されるプローブカードの探針にお
いて、前記探針先端部が釣針状に湾曲した形状と
されていることを特徴とするプローブカードの探
針。 A probe card probe whose tip is brought into contact with an electrode pad of a semiconductor device whose electrical characteristics are to be measured is characterized in that the tip of the probe is curved into a fishhook shape. needle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17991286U JPS6384572U (en) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17991286U JPS6384572U (en) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384572U true JPS6384572U (en) | 1988-06-02 |
Family
ID=31123394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17991286U Pending JPS6384572U (en) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384572U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994009374A1 (en) * | 1992-10-12 | 1994-04-28 | Kabushiki Kaisha Kobe Seiko Sho | Probe unit and method of manufacturing the same |
-
1986
- 1986-11-21 JP JP17991286U patent/JPS6384572U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994009374A1 (en) * | 1992-10-12 | 1994-04-28 | Kabushiki Kaisha Kobe Seiko Sho | Probe unit and method of manufacturing the same |