JPS6381807A - 単結晶シリコン薄膜の製造方法 - Google Patents
単結晶シリコン薄膜の製造方法Info
- Publication number
- JPS6381807A JPS6381807A JP22590086A JP22590086A JPS6381807A JP S6381807 A JPS6381807 A JP S6381807A JP 22590086 A JP22590086 A JP 22590086A JP 22590086 A JP22590086 A JP 22590086A JP S6381807 A JPS6381807 A JP S6381807A
- Authority
- JP
- Japan
- Prior art keywords
- crystal silicon
- single crystal
- thin film
- film
- silicon thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 114
- 239000010409 thin film Substances 0.000 title claims abstract description 72
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000010408 film Substances 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 239000013078 crystal Substances 0.000 claims abstract description 51
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 28
- 239000010703 silicon Substances 0.000 claims abstract description 28
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 13
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 11
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 10
- 239000011229 interlayer Substances 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 6
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000010899 nucleation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Recrystallisation Techniques (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22590086A JPS6381807A (ja) | 1986-09-26 | 1986-09-26 | 単結晶シリコン薄膜の製造方法 |
| US06/943,428 US4801351A (en) | 1985-12-20 | 1986-12-19 | Method of manufacturing monocrystalline thin-film |
| EP86117799A EP0227076B1 (en) | 1985-12-20 | 1986-12-19 | Method of manufacturing monocrystal thin-film |
| DE8686117799T DE3685732T2 (de) | 1985-12-20 | 1986-12-19 | Verfahren zur herstellung einer monokristallinen duennen schicht. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22590086A JPS6381807A (ja) | 1986-09-26 | 1986-09-26 | 単結晶シリコン薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381807A true JPS6381807A (ja) | 1988-04-12 |
| JPH0519976B2 JPH0519976B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=16836644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22590086A Granted JPS6381807A (ja) | 1985-12-20 | 1986-09-26 | 単結晶シリコン薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6381807A (enrdf_load_stackoverflow) |
-
1986
- 1986-09-26 JP JP22590086A patent/JPS6381807A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519976B2 (enrdf_load_stackoverflow) | 1993-03-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |