JPS6373554A - デジタル信号記憶装置 - Google Patents
デジタル信号記憶装置Info
- Publication number
- JPS6373554A JPS6373554A JP62218110A JP21811087A JPS6373554A JP S6373554 A JPS6373554 A JP S6373554A JP 62218110 A JP62218110 A JP 62218110A JP 21811087 A JP21811087 A JP 21811087A JP S6373554 A JPS6373554 A JP S6373554A
- Authority
- JP
- Japan
- Prior art keywords
- storage device
- thin film
- memory element
- membrane
- positions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015654 memory Effects 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000012528 membrane Substances 0.000 claims abstract description 28
- 239000010409 thin film Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000010354 integration Effects 0.000 abstract description 4
- 230000006399 behavior Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 54
- 230000006870 function Effects 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005865 ionizing radiation Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/24—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using capacitors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/04—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using capacitive elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Measuring Fluid Pressure (AREA)
- Credit Cards Or The Like (AREA)
- Signal Processing For Digital Recording And Reproducing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH3647/86A CH670914A5 (US20020130353A1-20020919-M00001.png) | 1986-09-10 | 1986-09-10 | |
CH03647/86-2 | 1986-09-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6373554A true JPS6373554A (ja) | 1988-04-04 |
Family
ID=4260485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62218110A Pending JPS6373554A (ja) | 1986-09-10 | 1987-09-02 | デジタル信号記憶装置 |
Country Status (8)
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007036201A (ja) * | 2005-06-22 | 2007-02-08 | Matsushita Electric Ind Co Ltd | 電気機械メモリ、それを用いた電気回路及び電気機械メモリの駆動方法 |
JP2008288426A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 記憶素子 |
Families Citing this family (100)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5538753A (en) * | 1991-10-14 | 1996-07-23 | Landis & Gyr Betriebs Ag | Security element |
EP0537439B2 (de) * | 1991-10-14 | 2003-07-09 | OVD Kinegram AG | Sicherheitselement |
GB9309327D0 (en) * | 1993-05-06 | 1993-06-23 | Smith Charles G | Bi-stable memory element |
US6100109A (en) * | 1994-11-02 | 2000-08-08 | Siemens Aktiengesellschaft | Method for producing a memory device |
ATE209818T1 (de) * | 1995-08-09 | 2001-12-15 | Infineon Technologies Ag | Speichervorrichtung und herstellungsverfahren |
US5638946A (en) * | 1996-01-11 | 1997-06-17 | Northeastern University | Micromechanical switch with insulated switch contact |
US6168395B1 (en) | 1996-02-10 | 2001-01-02 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Bistable microactuator with coupled membranes |
US6237590B1 (en) | 1997-09-18 | 2001-05-29 | Delsys Pharmaceutical Corporation | Dry powder delivery system apparatus |
US6188301B1 (en) * | 1998-11-13 | 2001-02-13 | General Electric Company | Switching structure and method of fabrication |
KR100611240B1 (ko) * | 1998-12-22 | 2006-08-10 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 이전에 인가된 전극 전압에 의존하는 전극 전압을 갖는 광 유도부를 포함하는 디스플레이 장치 |
US6211580B1 (en) * | 1998-12-29 | 2001-04-03 | Honeywell International Inc. | Twin configuration for increased life time in touch mode electrostatic actuators |
US6054745A (en) * | 1999-01-04 | 2000-04-25 | International Business Machines Corporation | Nonvolatile memory cell using microelectromechanical device |
JP2002539624A (ja) * | 1999-03-18 | 2002-11-19 | キャベンディッシュ・キネティックス・リミテッド | フレキシブル要素を有するフラッシュメモリ素子、フラッシュメモリデバイスおよび情報電荷蓄積方法 |
JP2003504857A (ja) * | 1999-07-02 | 2003-02-04 | プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ | ナノスコピックワイヤを用いる装置、アレイおよびその製造方法 |
JP2001102597A (ja) | 1999-09-30 | 2001-04-13 | Fuji Electric Co Ltd | 半導体構造およびその製造方法 |
US6716657B1 (en) * | 2000-05-26 | 2004-04-06 | Agere Systems Inc | Method for interconnecting arrays of micromechanical devices |
US6473361B1 (en) | 2000-11-10 | 2002-10-29 | Xerox Corporation | Electromechanical memory cell |
US7566478B2 (en) | 2001-07-25 | 2009-07-28 | Nantero, Inc. | Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7563711B1 (en) * | 2001-07-25 | 2009-07-21 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US6574130B2 (en) * | 2001-07-25 | 2003-06-03 | Nantero, Inc. | Hybrid circuit having nanotube electromechanical memory |
US6924538B2 (en) | 2001-07-25 | 2005-08-02 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US6919592B2 (en) | 2001-07-25 | 2005-07-19 | Nantero, Inc. | Electromechanical memory array using nanotube ribbons and method for making same |
US6706402B2 (en) | 2001-07-25 | 2004-03-16 | Nantero, Inc. | Nanotube films and articles |
US7259410B2 (en) * | 2001-07-25 | 2007-08-21 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US6911682B2 (en) * | 2001-12-28 | 2005-06-28 | Nantero, Inc. | Electromechanical three-trace junction devices |
US6835591B2 (en) | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
US6643165B2 (en) | 2001-07-25 | 2003-11-04 | Nantero, Inc. | Electromechanical memory having cell selection circuitry constructed with nanotube technology |
US7176505B2 (en) * | 2001-12-28 | 2007-02-13 | Nantero, Inc. | Electromechanical three-trace junction devices |
US6784028B2 (en) | 2001-12-28 | 2004-08-31 | Nantero, Inc. | Methods of making electromechanical three-trace junction devices |
ATE308062T1 (de) * | 2002-03-26 | 2005-11-15 | Koninkl Philips Electronics Nv | Anzeigevorrichtung mit einer lichtdurchlässigen platte und einem lichtabsorbierenden mittel |
US7335395B2 (en) | 2002-04-23 | 2008-02-26 | Nantero, Inc. | Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
JP4186727B2 (ja) * | 2002-07-26 | 2008-11-26 | 松下電器産業株式会社 | スイッチ |
CN100490044C (zh) * | 2002-07-26 | 2009-05-20 | 松下电器产业株式会社 | 开关 |
US6972881B1 (en) | 2002-11-21 | 2005-12-06 | Nuelight Corp. | Micro-electro-mechanical switch (MEMS) display panel with on-glass column multiplexers using MEMS as mux elements |
US7560136B2 (en) | 2003-01-13 | 2009-07-14 | Nantero, Inc. | Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
FR2852441A1 (fr) * | 2003-03-14 | 2004-09-17 | St Microelectronics Sa | Dispositif de memoire |
WO2005019793A2 (en) | 2003-05-14 | 2005-03-03 | Nantero, Inc. | Sensor platform using a horizontally oriented nanotube element |
US7199498B2 (en) | 2003-06-02 | 2007-04-03 | Ambient Systems, Inc. | Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same |
US7274064B2 (en) | 2003-06-09 | 2007-09-25 | Nanatero, Inc. | Non-volatile electromechanical field effect devices and circuits using same and methods of forming same |
US7112493B2 (en) * | 2003-06-09 | 2006-09-26 | Nantero, Inc. | Method of making non-volatile field effect devices and arrays of same |
FR2858459B1 (fr) * | 2003-08-01 | 2006-03-10 | Commissariat Energie Atomique | Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant |
WO2005084164A2 (en) * | 2003-08-13 | 2005-09-15 | Nantero, Inc. | Nanotube-based switching elements and logic circuits |
US7115960B2 (en) * | 2003-08-13 | 2006-10-03 | Nantero, Inc. | Nanotube-based switching elements |
JP2007502545A (ja) | 2003-08-13 | 2007-02-08 | ナンテロ,インク. | 複数の制御装置を有するナノチューブを基礎とする交換エレメントと上記エレメントから製造される回路 |
US7289357B2 (en) * | 2003-08-13 | 2007-10-30 | Nantero, Inc. | Isolation structure for deflectable nanotube elements |
WO2005017967A2 (en) * | 2003-08-13 | 2005-02-24 | Nantero, Inc. | Nanotube device structure and methods of fabrication |
US7416993B2 (en) * | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
US7215229B2 (en) * | 2003-09-17 | 2007-05-08 | Schneider Electric Industries Sas | Laminated relays with multiple flexible contacts |
JP4626142B2 (ja) * | 2003-11-18 | 2011-02-02 | 株式会社日立製作所 | 装置およびそれを用いたデータ処理方法 |
US7528437B2 (en) * | 2004-02-11 | 2009-05-05 | Nantero, Inc. | EEPROMS using carbon nanotubes for cell storage |
EP1751765A4 (en) * | 2004-05-24 | 2009-05-20 | Univ Boston | CONTROLLABLE NANOCHEMICAL MEMORY ELEMENT |
US7709880B2 (en) * | 2004-06-09 | 2010-05-04 | Nantero, Inc. | Field effect devices having a gate controlled via a nanotube switching element |
US7161403B2 (en) * | 2004-06-18 | 2007-01-09 | Nantero, Inc. | Storage elements using nanotube switching elements |
US7288970B2 (en) | 2004-06-18 | 2007-10-30 | Nantero, Inc. | Integrated nanotube and field effect switching device |
US7164744B2 (en) | 2004-06-18 | 2007-01-16 | Nantero, Inc. | Nanotube-based logic driver circuits |
US7167026B2 (en) * | 2004-06-18 | 2007-01-23 | Nantero, Inc. | Tri-state circuit using nanotube switching elements |
US7329931B2 (en) | 2004-06-18 | 2008-02-12 | Nantero, Inc. | Receiver circuit using nanotube-based switches and transistors |
US7330709B2 (en) * | 2004-06-18 | 2008-02-12 | Nantero, Inc. | Receiver circuit using nanotube-based switches and logic |
EP1805869A2 (en) * | 2004-07-19 | 2007-07-11 | Ambient Systems, Inc. | Nanometer-scale electrostatic and electromagnetic motors and generators |
WO2006121461A2 (en) | 2004-09-16 | 2006-11-16 | Nantero, Inc. | Light emitters using nanotubes and methods of making same |
ATE463034T1 (de) | 2004-09-22 | 2010-04-15 | Nantero Inc | Direktzugriffsspeicher mit nanoröhrenschaltelementen |
WO2006040726A1 (en) * | 2004-10-15 | 2006-04-20 | Koninklijke Philips Electronics N.V. | Method of operating a rfid system |
US7046539B1 (en) | 2004-11-02 | 2006-05-16 | Sandia Corporation | Mechanical memory |
US8362525B2 (en) | 2005-01-14 | 2013-01-29 | Nantero Inc. | Field effect device having a channel of nanofabric and methods of making same |
US7598544B2 (en) * | 2005-01-14 | 2009-10-06 | Nanotero, Inc. | Hybrid carbon nanotude FET(CNFET)-FET static RAM (SRAM) and method of making same |
US7579618B2 (en) | 2005-03-02 | 2009-08-25 | Northrop Grumman Corporation | Carbon nanotube resonator transistor and method of making same |
US8217490B2 (en) | 2005-05-09 | 2012-07-10 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7394687B2 (en) * | 2005-05-09 | 2008-07-01 | Nantero, Inc. | Non-volatile-shadow latch using a nanotube switch |
US7835170B2 (en) | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US8513768B2 (en) | 2005-05-09 | 2013-08-20 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7781862B2 (en) | 2005-05-09 | 2010-08-24 | Nantero, Inc. | Two-terminal nanotube devices and systems and methods of making same |
US7479654B2 (en) | 2005-05-09 | 2009-01-20 | Nantero, Inc. | Memory arrays using nanotube articles with reprogrammable resistance |
US7782650B2 (en) * | 2005-05-09 | 2010-08-24 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9196615B2 (en) | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US8013363B2 (en) * | 2005-05-09 | 2011-09-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
TWI324773B (en) | 2005-05-09 | 2010-05-11 | Nantero Inc | Non-volatile shadow latch using a nanotube switch |
US7928521B1 (en) | 2005-05-31 | 2011-04-19 | Nantero, Inc. | Non-tensioned carbon nanotube switch design and process for making same |
US7915122B2 (en) * | 2005-06-08 | 2011-03-29 | Nantero, Inc. | Self-aligned cell integration scheme |
US7349236B2 (en) * | 2005-06-24 | 2008-03-25 | Xerox Corporation | Electromechanical memory cell with torsional movement |
US7538040B2 (en) * | 2005-06-30 | 2009-05-26 | Nantero, Inc. | Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers |
GB0515980D0 (en) * | 2005-08-03 | 2005-09-07 | Cavendish Kinetics Ltd | Memory cell for a circuit and method of operation therefor |
CN101287698A (zh) | 2005-09-06 | 2008-10-15 | 诺华丝国际股份有限公司 | 含有甲硫氨酸的羟基类似物以及衍生物的罐装和干法涂布的抗微生物组合物 |
WO2007038558A2 (en) * | 2005-09-27 | 2007-04-05 | Cornell Research Foundation, Inc. | Shape memory device |
GB0525025D0 (en) * | 2005-12-08 | 2006-01-18 | Cavendish Kinetics Ltd | memory Cell and Array |
US7336527B1 (en) | 2005-12-14 | 2008-02-26 | International Business Machines Corporation | Electromechanical storage device |
KR100827705B1 (ko) * | 2006-10-23 | 2008-05-07 | 삼성전자주식회사 | 비 휘발성 메모리 소자 및 그의 제조방법 |
KR100834829B1 (ko) * | 2006-12-19 | 2008-06-03 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
FR2910706B1 (fr) * | 2006-12-21 | 2009-03-20 | Commissariat Energie Atomique | Element d'interconnexion a base de nanotubes de carbone |
US8385113B2 (en) | 2007-04-03 | 2013-02-26 | Cjp Ip Holdings, Ltd. | Nanoelectromechanical systems and methods for making the same |
US8031514B2 (en) * | 2007-04-09 | 2011-10-04 | Northeastern University | Bistable nanoswitch |
TWI461350B (zh) * | 2007-05-22 | 2014-11-21 | Nantero Inc | 使用奈米結構物之三極管及其製造方法 |
WO2009002748A1 (en) * | 2007-06-22 | 2008-12-31 | Nantero, Inc. | Two-terminal nanotube devices including a nanotube bridge and methods of making same |
US8704314B2 (en) | 2007-12-06 | 2014-04-22 | Massachusetts Institute Of Technology | Mechanical memory transistor |
US9263126B1 (en) | 2010-09-01 | 2016-02-16 | Nantero Inc. | Method for dynamically accessing and programming resistive change element arrays |
US8253171B1 (en) | 2009-08-27 | 2012-08-28 | Lockheed Martin Corporation | Two terminal nanotube switch, memory array incorporating the same and method of making |
US20130113810A1 (en) * | 2011-11-04 | 2013-05-09 | Qualcomm Mems Technologies, Inc. | Sidewall spacers along conductive lines |
ITTO20120224A1 (it) | 2012-03-15 | 2013-09-16 | St Microelectronics Srl | Elemento di memoria elettromeccanico integrato e memoria elettronica comprendente il medesimo |
KR101928344B1 (ko) * | 2012-10-24 | 2018-12-13 | 삼성전자주식회사 | 나노 공진 장치 및 방법 |
FR3085786B1 (fr) * | 2018-09-11 | 2021-02-19 | Commissariat Energie Atomique | Cellule de memorisation en logique capacitive |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4087810A (en) * | 1976-06-30 | 1978-05-02 | International Business Machines Corporation | Membrane deformographic display, and method of making |
FR2376549A1 (fr) * | 1977-01-04 | 1978-07-28 | Thomson Csf | Systeme bistable a electrets |
US4113360A (en) * | 1977-03-28 | 1978-09-12 | Siemens Aktiengesellschaft | Indicating device for illustrating symbols of all kinds |
US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
EP0046873A1 (en) * | 1980-09-02 | 1982-03-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
US4356730A (en) * | 1981-01-08 | 1982-11-02 | International Business Machines Corporation | Electrostatically deformographic switches |
US4543457A (en) * | 1984-01-25 | 1985-09-24 | Transensory Devices, Inc. | Microminiature force-sensitive switch |
US4704707A (en) * | 1984-08-21 | 1987-11-03 | Bos-Knox, Ltd. | Electrostatic random access memory |
US4736202A (en) * | 1984-08-21 | 1988-04-05 | Bos-Knox, Ltd. | Electrostatic binary switching and memory devices |
US4570139A (en) * | 1984-12-14 | 1986-02-11 | Eaton Corporation | Thin-film magnetically operated micromechanical electric switching device |
WO1986003879A1 (en) * | 1984-12-19 | 1986-07-03 | Simpson George R | Electrostatic binary switching and memory devices |
-
1986
- 1986-09-10 CH CH3647/86A patent/CH670914A5/de not_active IP Right Cessation
-
1987
- 1987-08-06 DE DE8787111361T patent/DE3776237D1/de not_active Expired - Fee Related
- 1987-08-06 EP EP87111361A patent/EP0259614B1/de not_active Expired - Lifetime
- 1987-08-06 AT AT87111361T patent/ATE72075T1/de not_active IP Right Cessation
- 1987-09-02 JP JP62218110A patent/JPS6373554A/ja active Pending
- 1987-09-09 NO NO873761A patent/NO873761L/no unknown
-
1989
- 1989-10-05 US US07/417,338 patent/US4979149A/en not_active Expired - Fee Related
-
1992
- 1992-03-18 GR GR920400471T patent/GR3004073T3/el unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007036201A (ja) * | 2005-06-22 | 2007-02-08 | Matsushita Electric Ind Co Ltd | 電気機械メモリ、それを用いた電気回路及び電気機械メモリの駆動方法 |
JP2008288426A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 記憶素子 |
Also Published As
Publication number | Publication date |
---|---|
NO873761D0 (no) | 1987-09-09 |
CH670914A5 (US20020130353A1-20020919-M00001.png) | 1989-07-14 |
GR3004073T3 (US20020130353A1-20020919-M00001.png) | 1993-03-31 |
DE3776237D1 (de) | 1992-03-05 |
US4979149A (en) | 1990-12-18 |
NO873761L (no) | 1988-03-11 |
ATE72075T1 (de) | 1992-02-15 |
EP0259614B1 (de) | 1992-01-22 |
EP0259614A1 (de) | 1988-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6373554A (ja) | デジタル信号記憶装置 | |
US6473361B1 (en) | Electromechanical memory cell | |
US10943646B2 (en) | Memory device, driving method thereof, semiconductor device, electronic component, and electronic device | |
Halg | On a micro-electro-mechanical nonvolatile memory cell | |
US7349236B2 (en) | Electromechanical memory cell with torsional movement | |
TW548656B (en) | Magnetic memory device | |
CN100557701C (zh) | 用于对读出操作产生字符线电压的系统及方法 | |
CN102754162B (zh) | 半导体器件及半导体器件的驱动方法 | |
CN102754163B (zh) | 半导体器件 | |
KR960032759A (ko) | 메모리 장치 | |
KR0182813B1 (ko) | 강유전성 메모리셀 및 그의 판독/기록방법 | |
JPH0346199A (ja) | 酸化物ブレークダウンmosヒューズ及びそのメモリカードへの利用 | |
CN100552804C (zh) | 用于产生调整增压电压的系统及产生增压电压的方法 | |
KR100242504B1 (ko) | 강유전성 반도체 메모리 및 그 억세스 방법 | |
US7289352B2 (en) | Semiconductor storage device | |
JPH0963293A (ja) | メモリ装置およびその製造方法 | |
EP0099473A2 (en) | Integrated combined dynamic RAM and ROS | |
TW533417B (en) | Non-volatile semiconductor memory device | |
EP0244628B1 (en) | Sense amplifier for a semiconductor memory device | |
JP2004515032A (ja) | 磁気抵抗メモリーおよびその読み出し方法 | |
Roh et al. | Scaling trend of nanoelectromechanical (NEM) nonvolatile memory cells based on finite element analysis (FEA) | |
Worsey et al. | Fully microelectromechanical non-volatile memory cell | |
KR0170518B1 (ko) | 승압 전원을 사용하는 디램 장치의 전원 공급 회로 | |
TW541534B (en) | Static 2T-1C ferroelectric memory | |
US20100039729A1 (en) | Package with integrated magnets for electromagnetically-actuated probe-storage device |