JPS637165U - - Google Patents

Info

Publication number
JPS637165U
JPS637165U JP9836186U JP9836186U JPS637165U JP S637165 U JPS637165 U JP S637165U JP 9836186 U JP9836186 U JP 9836186U JP 9836186 U JP9836186 U JP 9836186U JP S637165 U JPS637165 U JP S637165U
Authority
JP
Japan
Prior art keywords
substrate
load
cart
chamber
substrate cart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9836186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9836186U priority Critical patent/JPS637165U/ja
Publication of JPS637165U publication Critical patent/JPS637165U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP9836186U 1986-06-25 1986-06-25 Pending JPS637165U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9836186U JPS637165U (enrdf_load_stackoverflow) 1986-06-25 1986-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9836186U JPS637165U (enrdf_load_stackoverflow) 1986-06-25 1986-06-25

Publications (1)

Publication Number Publication Date
JPS637165U true JPS637165U (enrdf_load_stackoverflow) 1988-01-18

Family

ID=30966225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9836186U Pending JPS637165U (enrdf_load_stackoverflow) 1986-06-25 1986-06-25

Country Status (1)

Country Link
JP (1) JPS637165U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106456U (enrdf_load_stackoverflow) * 1989-02-08 1990-08-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106456U (enrdf_load_stackoverflow) * 1989-02-08 1990-08-23

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