JPS637124B2 - - Google Patents
Info
- Publication number
- JPS637124B2 JPS637124B2 JP15382282A JP15382282A JPS637124B2 JP S637124 B2 JPS637124 B2 JP S637124B2 JP 15382282 A JP15382282 A JP 15382282A JP 15382282 A JP15382282 A JP 15382282A JP S637124 B2 JPS637124 B2 JP S637124B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- single crystal
- crystal orientation
- plane
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 68
- 238000000034 method Methods 0.000 claims description 9
- 238000003672 processing method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000000137 annealing Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57153822A JPS5942916A (ja) | 1982-09-06 | 1982-09-06 | 単結晶の加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57153822A JPS5942916A (ja) | 1982-09-06 | 1982-09-06 | 単結晶の加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5942916A JPS5942916A (ja) | 1984-03-09 |
| JPS637124B2 true JPS637124B2 (de) | 1988-02-15 |
Family
ID=15570846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57153822A Granted JPS5942916A (ja) | 1982-09-06 | 1982-09-06 | 単結晶の加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5942916A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01110910A (ja) * | 1987-10-26 | 1989-04-27 | Toshiba Corp | 薄板切断方法および薄板切断装置 |
| RU2440885C2 (ru) * | 2007-06-25 | 2012-01-27 | Сэнт-Гобэн Керамикс Энд Пластикс, Инк. | Способ изменения кристаллографической ориентации монокристаллического тела (варианты) и устройство для его осуществления |
| CN102785298B (zh) * | 2012-07-09 | 2015-10-28 | 浙江上城科技有限公司 | 一种蓝宝石工件粘胶台 |
| CN110065171B (zh) * | 2019-04-25 | 2021-12-24 | 西安奕斯伟材料科技有限公司 | 一种切割装置和晶棒的切割方法 |
-
1982
- 1982-09-06 JP JP57153822A patent/JPS5942916A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5942916A (ja) | 1984-03-09 |
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