JPS6369159U - - Google Patents
Info
- Publication number
- JPS6369159U JPS6369159U JP16483386U JP16483386U JPS6369159U JP S6369159 U JPS6369159 U JP S6369159U JP 16483386 U JP16483386 U JP 16483386U JP 16483386 U JP16483386 U JP 16483386U JP S6369159 U JPS6369159 U JP S6369159U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- disk
- target chamber
- stocker
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 10
- 238000005468 ion implantation Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16483386U JPS6369159U (fr) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16483386U JPS6369159U (fr) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6369159U true JPS6369159U (fr) | 1988-05-10 |
Family
ID=31094316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16483386U Pending JPS6369159U (fr) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6369159U (fr) |
-
1986
- 1986-10-27 JP JP16483386U patent/JPS6369159U/ja active Pending
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