JPS636860A - フリップチップ用バンプ形成方法 - Google Patents

フリップチップ用バンプ形成方法

Info

Publication number
JPS636860A
JPS636860A JP61149582A JP14958286A JPS636860A JP S636860 A JPS636860 A JP S636860A JP 61149582 A JP61149582 A JP 61149582A JP 14958286 A JP14958286 A JP 14958286A JP S636860 A JPS636860 A JP S636860A
Authority
JP
Japan
Prior art keywords
wafer
plating
current film
jig
bumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61149582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580141B2 (enExample
Inventor
Hiromi Takahashi
高橋　博実
Yasuo Iguchi
泰男 井口
Yoshiro Takahashi
高橋　良郎
Isao Shibata
柴田　勲夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP61149582A priority Critical patent/JPS636860A/ja
Publication of JPS636860A publication Critical patent/JPS636860A/ja
Publication of JPH0580141B2 publication Critical patent/JPH0580141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/012—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP61149582A 1986-06-27 1986-06-27 フリップチップ用バンプ形成方法 Granted JPS636860A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61149582A JPS636860A (ja) 1986-06-27 1986-06-27 フリップチップ用バンプ形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61149582A JPS636860A (ja) 1986-06-27 1986-06-27 フリップチップ用バンプ形成方法

Publications (2)

Publication Number Publication Date
JPS636860A true JPS636860A (ja) 1988-01-12
JPH0580141B2 JPH0580141B2 (enExample) 1993-11-08

Family

ID=15478348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61149582A Granted JPS636860A (ja) 1986-06-27 1986-06-27 フリップチップ用バンプ形成方法

Country Status (1)

Country Link
JP (1) JPS636860A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049018A (ja) * 1990-04-26 1992-01-13 Asahi Optical Co Ltd ファインダ装置およびファインダ装置を備えたカメラ
US5914274A (en) * 1996-03-21 1999-06-22 Matsushita Electric Industrial Co., Ltd. Substrate on which bumps are formed and method of forming the same
JP2006066437A (ja) * 2004-08-24 2006-03-09 Oki Electric Ind Co Ltd 半導体装置の製造方法及び当該製造方法に使用される製造装置
JP2007048802A (ja) * 2005-08-08 2007-02-22 Tdk Corp 配線板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817638A (ja) * 1981-07-24 1983-02-01 Hitachi Ltd バンプ形成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817638A (ja) * 1981-07-24 1983-02-01 Hitachi Ltd バンプ形成装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049018A (ja) * 1990-04-26 1992-01-13 Asahi Optical Co Ltd ファインダ装置およびファインダ装置を備えたカメラ
US5914274A (en) * 1996-03-21 1999-06-22 Matsushita Electric Industrial Co., Ltd. Substrate on which bumps are formed and method of forming the same
US6042953A (en) * 1996-03-21 2000-03-28 Matsushita Electric Industrial Co., Ltd. Substrate on which bumps are formed and method of forming the same
JP2006066437A (ja) * 2004-08-24 2006-03-09 Oki Electric Ind Co Ltd 半導体装置の製造方法及び当該製造方法に使用される製造装置
JP2007048802A (ja) * 2005-08-08 2007-02-22 Tdk Corp 配線板

Also Published As

Publication number Publication date
JPH0580141B2 (enExample) 1993-11-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term