JPS6367363B2 - - Google Patents
Info
- Publication number
- JPS6367363B2 JPS6367363B2 JP6630880A JP6630880A JPS6367363B2 JP S6367363 B2 JPS6367363 B2 JP S6367363B2 JP 6630880 A JP6630880 A JP 6630880A JP 6630880 A JP6630880 A JP 6630880A JP S6367363 B2 JPS6367363 B2 JP S6367363B2
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- transducer
- crystal plate
- piezoelectric crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 56
- 239000013078 crystal Substances 0.000 claims description 54
- 230000005284 excitation Effects 0.000 claims description 23
- 238000005530 etching Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 24
- 239000010408 film Substances 0.000 description 22
- 238000010586 diagram Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- 230000005616 pyroelectricity Effects 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000011651 chromium Substances 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02921—Measures for preventing electric discharge due to pyroelectricity
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6630880A JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6630880A JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56162523A JPS56162523A (en) | 1981-12-14 |
| JPS6367363B2 true JPS6367363B2 (enrdf_load_stackoverflow) | 1988-12-26 |
Family
ID=13312048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6630880A Granted JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56162523A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0064506B2 (en) * | 1980-11-17 | 1991-12-27 | National Research Development Corporation | Improvements in or relating to methods of producing devices comprising metallised regions on dielectric substrates |
| JPS59144391A (ja) * | 1983-02-03 | 1984-08-18 | Tokyo Electric Co Ltd | 電気掃除機 |
| JPH0758876B2 (ja) * | 1990-10-12 | 1995-06-21 | 日本無線株式会社 | 表面弾性波素子 |
| DE19758198A1 (de) * | 1997-12-30 | 1999-08-19 | Siemens Ag | Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat |
| DE10142789C1 (de) * | 2001-08-31 | 2003-05-28 | Advalytix Ag | Bewegungselement für kleine Flüssigkeitsmengen |
-
1980
- 1980-05-19 JP JP6630880A patent/JPS56162523A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56162523A (en) | 1981-12-14 |
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