JPS56162523A - Elastic surface wave device - Google Patents
Elastic surface wave deviceInfo
- Publication number
- JPS56162523A JPS56162523A JP6630880A JP6630880A JPS56162523A JP S56162523 A JPS56162523 A JP S56162523A JP 6630880 A JP6630880 A JP 6630880A JP 6630880 A JP6630880 A JP 6630880A JP S56162523 A JPS56162523 A JP S56162523A
- Authority
- JP
- Japan
- Prior art keywords
- metallic film
- crystal plate
- solution
- adhered
- occurrence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 abstract 3
- 239000000243 solution Substances 0.000 abstract 3
- 238000005530 etching Methods 0.000 abstract 2
- 229910003327 LiNbO3 Inorganic materials 0.000 abstract 1
- 229910012463 LiTaO3 Inorganic materials 0.000 abstract 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000011259 mixed solution Substances 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 230000005616 pyroelectricity Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02921—Measures for preventing electric discharge due to pyroelectricity
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6630880A JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6630880A JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56162523A true JPS56162523A (en) | 1981-12-14 |
JPS6367363B2 JPS6367363B2 (enrdf_load_stackoverflow) | 1988-12-26 |
Family
ID=13312048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6630880A Granted JPS56162523A (en) | 1980-05-19 | 1980-05-19 | Elastic surface wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56162523A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501759A (enrdf_load_stackoverflow) * | 1980-11-17 | 1982-09-24 | ||
JPS59144391A (ja) * | 1983-02-03 | 1984-08-18 | Tokyo Electric Co Ltd | 電気掃除機 |
JPH04150512A (ja) * | 1990-10-12 | 1992-05-25 | Japan Radio Co Ltd | 表面弾性波素子 |
DE19758198A1 (de) * | 1997-12-30 | 1999-08-19 | Siemens Ag | Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat |
WO2003018181A1 (de) * | 2001-08-31 | 2003-03-06 | Advalytix Ag | Bewegungselement für kleine flüssigkeitsmengen |
-
1980
- 1980-05-19 JP JP6630880A patent/JPS56162523A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501759A (enrdf_load_stackoverflow) * | 1980-11-17 | 1982-09-24 | ||
JPS59144391A (ja) * | 1983-02-03 | 1984-08-18 | Tokyo Electric Co Ltd | 電気掃除機 |
JPH04150512A (ja) * | 1990-10-12 | 1992-05-25 | Japan Radio Co Ltd | 表面弾性波素子 |
DE19758198A1 (de) * | 1997-12-30 | 1999-08-19 | Siemens Ag | Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat |
WO2003018181A1 (de) * | 2001-08-31 | 2003-03-06 | Advalytix Ag | Bewegungselement für kleine flüssigkeitsmengen |
Also Published As
Publication number | Publication date |
---|---|
JPS6367363B2 (enrdf_load_stackoverflow) | 1988-12-26 |
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