JPS56162523A - Elastic surface wave device - Google Patents

Elastic surface wave device

Info

Publication number
JPS56162523A
JPS56162523A JP6630880A JP6630880A JPS56162523A JP S56162523 A JPS56162523 A JP S56162523A JP 6630880 A JP6630880 A JP 6630880A JP 6630880 A JP6630880 A JP 6630880A JP S56162523 A JPS56162523 A JP S56162523A
Authority
JP
Japan
Prior art keywords
metallic film
crystal plate
solution
adhered
occurrence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6630880A
Other languages
Japanese (ja)
Other versions
JPS6367363B2 (en
Inventor
Hiroaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP6630880A priority Critical patent/JPS56162523A/en
Publication of JPS56162523A publication Critical patent/JPS56162523A/en
Publication of JPS6367363B2 publication Critical patent/JPS6367363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02921—Measures for preventing electric discharge due to pyroelectricity

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To improve the reliability of equipment by eliminating the occurrence of discharge by increasing the hole diameter of a crack after etching the surface of a piezoelectric crystal plate and by vapor-depositing a metallic film on its internal wall. CONSTITUTION:The surface of a piezoelectric plate, such as an LiNbO3 and LiTaO3 crystal plate, is polished with chemicals to be made smooth and the reverse surface, on the other hand, is roughened. Then, at least the reverse surface of the crystal plate is immersed in an etching solution, such as a mixed solution of an aqueous NH4F solution and HF or that of an aqueous nitric acid solution and HF, to etch a worked layer away. Respective transducers are formed on the surface and then a metallic film 42, etc., are adhered by vapor deposition. In this case hole diameters of cracks 51a-51c are increased and the metallic film 42 are adhered to their internal walls. Thus, the occurrence of discharge based upon pyroelectricity is eliminated completely and the reliability of equipment is improved remarkably.
JP6630880A 1980-05-19 1980-05-19 Elastic surface wave device Granted JPS56162523A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6630880A JPS56162523A (en) 1980-05-19 1980-05-19 Elastic surface wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6630880A JPS56162523A (en) 1980-05-19 1980-05-19 Elastic surface wave device

Publications (2)

Publication Number Publication Date
JPS56162523A true JPS56162523A (en) 1981-12-14
JPS6367363B2 JPS6367363B2 (en) 1988-12-26

Family

ID=13312048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6630880A Granted JPS56162523A (en) 1980-05-19 1980-05-19 Elastic surface wave device

Country Status (1)

Country Link
JP (1) JPS56162523A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501759A (en) * 1980-11-17 1982-09-24
JPS59144391A (en) * 1983-02-03 1984-08-18 Tokyo Electric Co Ltd Electric cleaner
JPH04150512A (en) * 1990-10-12 1992-05-25 Japan Radio Co Ltd Surface acoustic wave element
DE19758198A1 (en) * 1997-12-30 1999-08-19 Siemens Ag Surface wave (SAW) device on pyroelectric single crystal substrate
WO2003018181A1 (en) * 2001-08-31 2003-03-06 Advalytix Ag Motion element for small quantities of liquid

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501759A (en) * 1980-11-17 1982-09-24
JPS59144391A (en) * 1983-02-03 1984-08-18 Tokyo Electric Co Ltd Electric cleaner
JPH05960B2 (en) * 1983-02-03 1993-01-07 Tokyo Electric Co Ltd
JPH04150512A (en) * 1990-10-12 1992-05-25 Japan Radio Co Ltd Surface acoustic wave element
DE19758198A1 (en) * 1997-12-30 1999-08-19 Siemens Ag Surface wave (SAW) device on pyroelectric single crystal substrate
WO2003018181A1 (en) * 2001-08-31 2003-03-06 Advalytix Ag Motion element for small quantities of liquid

Also Published As

Publication number Publication date
JPS6367363B2 (en) 1988-12-26

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