FR2883370B1 - METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE - Google Patents

METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Info

Publication number
FR2883370B1
FR2883370B1 FR0502771A FR0502771A FR2883370B1 FR 2883370 B1 FR2883370 B1 FR 2883370B1 FR 0502771 A FR0502771 A FR 0502771A FR 0502771 A FR0502771 A FR 0502771A FR 2883370 B1 FR2883370 B1 FR 2883370B1
Authority
FR
France
Prior art keywords
arms
resonator
manufacturing
measuring device
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0502771A
Other languages
French (fr)
Other versions
FR2883370A1 (en
Inventor
Jose Beitia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0502771A priority Critical patent/FR2883370B1/en
Publication of FR2883370A1 publication Critical patent/FR2883370A1/en
Application granted granted Critical
Publication of FR2883370B1 publication Critical patent/FR2883370B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The method involves configuring a blank (1) of a star shaped piezoelectric mechanical resonator such that a frequency of flexion mode of resonator arms (2) outside a plane of the arms is greater than a frequency of flexion modes of the arms in the plane. Upper and lower sides of the arms are corroded with a chemical etchant solution (9) e.g. amonium biflouride solution, such that a thickness reduction of the arms corresponds to a lowering of the frequency of the flexion mode outside the plane.
FR0502771A 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE Expired - Fee Related FR2883370B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0502771A FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0502771A FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Publications (2)

Publication Number Publication Date
FR2883370A1 FR2883370A1 (en) 2006-09-22
FR2883370B1 true FR2883370B1 (en) 2007-06-01

Family

ID=35295351

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0502771A Expired - Fee Related FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Country Status (1)

Country Link
FR (1) FR2883370B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5160974B2 (en) 2008-06-23 2013-03-13 北陸電気工業株式会社 Biaxial angular velocity sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741151B1 (en) * 1995-11-13 1998-01-30 Sfim Ind MECHANICAL RESONATOR GYROMETER
JP2000304544A (en) * 1999-04-19 2000-11-02 Murata Mfg Co Ltd Angular velocity sensor and control method for its detection sensitivity
JP4288914B2 (en) * 2002-08-21 2009-07-01 パナソニック株式会社 Resonant device manufacturing method

Also Published As

Publication number Publication date
FR2883370A1 (en) 2006-09-22

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Legal Events

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Effective date: 20121130