JPS6367247U - - Google Patents
Info
- Publication number
- JPS6367247U JPS6367247U JP16133686U JP16133686U JPS6367247U JP S6367247 U JPS6367247 U JP S6367247U JP 16133686 U JP16133686 U JP 16133686U JP 16133686 U JP16133686 U JP 16133686U JP S6367247 U JPS6367247 U JP S6367247U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- section
- loader
- rotating member
- unloader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16133686U JPH0517885Y2 (US07943777-20110517-C00090.png) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16133686U JPH0517885Y2 (US07943777-20110517-C00090.png) | 1986-10-20 | 1986-10-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6367247U true JPS6367247U (US07943777-20110517-C00090.png) | 1988-05-06 |
JPH0517885Y2 JPH0517885Y2 (US07943777-20110517-C00090.png) | 1993-05-13 |
Family
ID=31087556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16133686U Expired - Lifetime JPH0517885Y2 (US07943777-20110517-C00090.png) | 1986-10-20 | 1986-10-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0517885Y2 (US07943777-20110517-C00090.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03290946A (ja) * | 1990-03-30 | 1991-12-20 | Tokyo Electron Ltd | 処理装置および処理方法およびレジスト処理装置 |
CN102690052A (zh) * | 2012-05-25 | 2012-09-26 | 熊进 | 一种玻璃下料装置 |
JP2013149703A (ja) * | 2012-01-18 | 2013-08-01 | Nippon Steel & Sumikin Fine Technology Co Ltd | ウエハ搬送装置 |
-
1986
- 1986-10-20 JP JP16133686U patent/JPH0517885Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03290946A (ja) * | 1990-03-30 | 1991-12-20 | Tokyo Electron Ltd | 処理装置および処理方法およびレジスト処理装置 |
JP2013149703A (ja) * | 2012-01-18 | 2013-08-01 | Nippon Steel & Sumikin Fine Technology Co Ltd | ウエハ搬送装置 |
CN102690052A (zh) * | 2012-05-25 | 2012-09-26 | 熊进 | 一种玻璃下料装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0517885Y2 (US07943777-20110517-C00090.png) | 1993-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4627787A (en) | Chip selection in automatic assembly of integrated circuit | |
JPS6367247U (US07943777-20110517-C00090.png) | ||
JP2003077983A (ja) | ウエハ搬送具及びウエハ搬送システム | |
JPH0338051A (ja) | 半導体ウェーハのハンドリング方法及び装置 | |
JPH0774229A (ja) | 半導体基板位置検知装置 | |
JP2652711B2 (ja) | 半導体検査装置及び検査方法 | |
JPH0625010Y2 (ja) | ウエハの受渡し機構 | |
JP3892578B2 (ja) | ウエハ搬送装置 | |
JPS6117742U (ja) | 半導体製造装置 | |
JP2000221235A (ja) | 半導体検査装置 | |
JPH0590308A (ja) | ダイボンド方法およびダイボンド装置用チツプストツクトレイ | |
JPS59115648U (ja) | 半導体ウエハ移替装置 | |
JPS60174249U (ja) | 半導体ウエハのセツト装置 | |
JPS6322738U (US07943777-20110517-C00090.png) | ||
JPH03152029A (ja) | ウエハの搬送機構 | |
JPS5961535U (ja) | ウエ−ハ搬送装置 | |
JPH0719810B2 (ja) | プロ−ブ装置 | |
JPH0412949A (ja) | 円板状ワーク用搬送装置 | |
JPH09115991A (ja) | 半導体基板処理装置 | |
JPS5889933U (ja) | ボンディング装置 | |
JPS5966199A (ja) | パツケ−ジ搬送機構 | |
JPS6155339U (US07943777-20110517-C00090.png) | ||
JPH03105940A (ja) | ウェハープロービング装置 | |
JPH04123542U (ja) | ウエ−ハハンドリング治具 | |
JPH01272127A (ja) | ロボットハンドラのループ搬送方式 |