JPS6366928A - 熱処理装置 - Google Patents

Info

Publication number

JPS6366928A

JPS6366928A JP21099486A JP21099486A JPS6366928A JP S6366928 A JPS6366928 A JP S6366928A JP 21099486 A JP21099486 A JP 21099486A JP 21099486 A JP21099486 A JP 21099486A JP S6366928 A JPS6366928 A JP S6366928A

Authority

JP

Japan

Prior art keywords

jacket

boat

reaction tube

opening

heat treatment

Prior art date

1986-09-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007669 thermal treatment Methods 0.000 title 1
• 238000010438 heat treatment Methods 0.000 claims abstract description 21
• 239000012495 reaction gas Substances 0.000 claims abstract description 17
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 10
• 239000004065 semiconductor Substances 0.000 abstract description 6
• 238000009792 diffusion process Methods 0.000 description 8
• 235000012431 wafers Nutrition 0.000 description 6
• 239000007789 gas Substances 0.000 description 3
• 230000000694 effects Effects 0.000 description 2
• 230000005855 radiation Effects 0.000 description 2
• 230000000630 rising effect Effects 0.000 description 2
• 238000002791 soaking Methods 0.000 description 2
• POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 238000011109 contamination Methods 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 230000006866 deterioration Effects 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000000376 reactant Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (3)