JPS6366020B2 - - Google Patents
Info
- Publication number
- JPS6366020B2 JPS6366020B2 JP6707979A JP6707979A JPS6366020B2 JP S6366020 B2 JPS6366020 B2 JP S6366020B2 JP 6707979 A JP6707979 A JP 6707979A JP 6707979 A JP6707979 A JP 6707979A JP S6366020 B2 JPS6366020 B2 JP S6366020B2
- Authority
- JP
- Japan
- Prior art keywords
- light source
- light
- image
- optical sensor
- exposure table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 description 12
- 238000005259 measurement Methods 0.000 description 9
- 239000003086 colorant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6707979A JPS55159539A (en) | 1979-05-30 | 1979-05-30 | Source position meter for exposure base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6707979A JPS55159539A (en) | 1979-05-30 | 1979-05-30 | Source position meter for exposure base |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55159539A JPS55159539A (en) | 1980-12-11 |
| JPS6366020B2 true JPS6366020B2 (cg-RX-API-DMAC7.html) | 1988-12-19 |
Family
ID=13334498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6707979A Granted JPS55159539A (en) | 1979-05-30 | 1979-05-30 | Source position meter for exposure base |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55159539A (cg-RX-API-DMAC7.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5778126A (en) * | 1980-10-31 | 1982-05-15 | Matsushita Electric Industrial Co Ltd | Metallized film condenser |
| JPS58223701A (ja) * | 1982-06-23 | 1983-12-26 | Toshiba Corp | 光源位置測定装置 |
| JPS5911047U (ja) * | 1982-07-14 | 1984-01-24 | 河西工業株式会社 | 電話機設置台付サイドトリム |
| JP2602206B2 (ja) * | 1986-01-14 | 1997-04-23 | 松下電工株式会社 | 配線用遮断器 |
| JP2782668B2 (ja) * | 1994-05-18 | 1998-08-06 | 関西日本電気株式会社 | 露光装置 |
| JPH08264122A (ja) * | 1995-03-28 | 1996-10-11 | Nec Kansai Ltd | アライメント測定装置及びその使用方法 |
-
1979
- 1979-05-30 JP JP6707979A patent/JPS55159539A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55159539A (en) | 1980-12-11 |
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