JPS6365952U - - Google Patents

Info

Publication number
JPS6365952U
JPS6365952U JP15922686U JP15922686U JPS6365952U JP S6365952 U JPS6365952 U JP S6365952U JP 15922686 U JP15922686 U JP 15922686U JP 15922686 U JP15922686 U JP 15922686U JP S6365952 U JPS6365952 U JP S6365952U
Authority
JP
Japan
Prior art keywords
sample
chamber
preliminary chamber
electron beam
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15922686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15922686U priority Critical patent/JPS6365952U/ja
Publication of JPS6365952U publication Critical patent/JPS6365952U/ja
Pending legal-status Critical Current

Links

JP15922686U 1986-10-17 1986-10-17 Pending JPS6365952U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15922686U JPS6365952U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15922686U JPS6365952U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365952U true JPS6365952U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31083459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15922686U Pending JPS6365952U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365952U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010061990A (ja) * 2008-09-03 2010-03-18 Japan Science & Technology Agency 電子顕微鏡用試料ホルダ。
JP2010518583A (ja) * 2007-02-06 2010-05-27 エフ・イ−・アイ・カンパニー 高圧荷電粒子ビーム・システム
JP2011258451A (ja) * 2010-06-10 2011-12-22 Hitachi High-Technologies Corp 走査電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010518583A (ja) * 2007-02-06 2010-05-27 エフ・イ−・アイ・カンパニー 高圧荷電粒子ビーム・システム
JP2010061990A (ja) * 2008-09-03 2010-03-18 Japan Science & Technology Agency 電子顕微鏡用試料ホルダ。
JP2011258451A (ja) * 2010-06-10 2011-12-22 Hitachi High-Technologies Corp 走査電子顕微鏡

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