JPS6157464U - - Google Patents
Info
- Publication number
- JPS6157464U JPS6157464U JP14251084U JP14251084U JPS6157464U JP S6157464 U JPS6157464 U JP S6157464U JP 14251084 U JP14251084 U JP 14251084U JP 14251084 U JP14251084 U JP 14251084U JP S6157464 U JPS6157464 U JP S6157464U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- metal bellows
- vacuum
- mirror body
- sealing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 6
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14251084U JPH0451415Y2 (enrdf_load_stackoverflow) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14251084U JPH0451415Y2 (enrdf_load_stackoverflow) | 1984-09-20 | 1984-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6157464U true JPS6157464U (enrdf_load_stackoverflow) | 1986-04-17 |
| JPH0451415Y2 JPH0451415Y2 (enrdf_load_stackoverflow) | 1992-12-03 |
Family
ID=30700831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14251084U Expired JPH0451415Y2 (enrdf_load_stackoverflow) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451415Y2 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008217832A (ja) * | 2008-06-12 | 2008-09-18 | Neuron:Kk | バーコードリーダ |
| JP2016024900A (ja) * | 2014-07-17 | 2016-02-08 | 日本電子株式会社 | 放射線分析装置 |
| JP2019091561A (ja) * | 2017-11-13 | 2019-06-13 | 日本電子株式会社 | 荷電粒子線装置 |
| WO2021099105A1 (en) * | 2019-11-19 | 2021-05-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle imaging system |
-
1984
- 1984-09-20 JP JP14251084U patent/JPH0451415Y2/ja not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008217832A (ja) * | 2008-06-12 | 2008-09-18 | Neuron:Kk | バーコードリーダ |
| JP2016024900A (ja) * | 2014-07-17 | 2016-02-08 | 日本電子株式会社 | 放射線分析装置 |
| JP2019091561A (ja) * | 2017-11-13 | 2019-06-13 | 日本電子株式会社 | 荷電粒子線装置 |
| WO2021099105A1 (en) * | 2019-11-19 | 2021-05-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle imaging system |
| US11094501B2 (en) | 2019-11-19 | 2021-08-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Secondary charged particle imaging system |
| CN114730683A (zh) * | 2019-11-19 | 2022-07-08 | Ict半导体集成电路测试有限公司 | 带电粒子成像系统 |
| TWI771795B (zh) * | 2019-11-19 | 2022-07-21 | 德商Ｉｃｔ積體電路測試股份有限公司 | 次級帶電粒子成像系統 |
| CN114730683B (zh) * | 2019-11-19 | 2025-04-25 | Ict半导体集成电路测试有限公司 | 次级带电粒子成像系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451415Y2 (enrdf_load_stackoverflow) | 1992-12-03 |