JPS6112332B2 - - Google Patents

Info

Publication number
JPS6112332B2
JPS6112332B2 JP53088024A JP8802478A JPS6112332B2 JP S6112332 B2 JPS6112332 B2 JP S6112332B2 JP 53088024 A JP53088024 A JP 53088024A JP 8802478 A JP8802478 A JP 8802478A JP S6112332 B2 JPS6112332 B2 JP S6112332B2
Authority
JP
Japan
Prior art keywords
sample
backscattered
axis
backscattered electron
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53088024A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5514683A (en
Inventor
Masaji Kikuchi
Hidehiko Sekiguchi
Osamu Manabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP8802478A priority Critical patent/JPS5514683A/ja
Publication of JPS5514683A publication Critical patent/JPS5514683A/ja
Publication of JPS6112332B2 publication Critical patent/JPS6112332B2/ja
Granted legal-status Critical Current

Links

JP8802478A 1978-07-19 1978-07-19 Reflected electron detector for scan electronic microscope Granted JPS5514683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8802478A JPS5514683A (en) 1978-07-19 1978-07-19 Reflected electron detector for scan electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8802478A JPS5514683A (en) 1978-07-19 1978-07-19 Reflected electron detector for scan electronic microscope

Publications (2)

Publication Number Publication Date
JPS5514683A JPS5514683A (en) 1980-02-01
JPS6112332B2 true JPS6112332B2 (enrdf_load_stackoverflow) 1986-04-08

Family

ID=13931250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8802478A Granted JPS5514683A (en) 1978-07-19 1978-07-19 Reflected electron detector for scan electronic microscope

Country Status (1)

Country Link
JP (1) JPS5514683A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584657U (ja) * 1981-06-30 1983-01-12 株式会社コンポジツトシステム研究所 メツキ用電極材
JPS613662U (ja) * 1984-06-12 1986-01-10 日本電子株式会社 ２次電子検出装置
JPS6248658U (enrdf_load_stackoverflow) * 1985-09-12 1987-03-25

Also Published As

Publication number Publication date
JPS5514683A (en) 1980-02-01

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