JPS6248658U - - Google Patents

Info

Publication number
JPS6248658U
JPS6248658U JP14000385U JP14000385U JPS6248658U JP S6248658 U JPS6248658 U JP S6248658U JP 14000385 U JP14000385 U JP 14000385U JP 14000385 U JP14000385 U JP 14000385U JP S6248658 U JPS6248658 U JP S6248658U
Authority
JP
Japan
Prior art keywords
shaft
detector
cylindrical
holder
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14000385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14000385U priority Critical patent/JPS6248658U/ja
Publication of JPS6248658U publication Critical patent/JPS6248658U/ja
Pending legal-status Critical Current

Links

JP14000385U 1985-09-12 1985-09-12 Pending JPS6248658U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14000385U JPS6248658U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14000385U JPS6248658U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6248658U true JPS6248658U (enrdf_load_stackoverflow) 1987-03-25

Family

ID=31046438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14000385U Pending JPS6248658U (enrdf_load_stackoverflow) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6248658U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514683A (en) * 1978-07-19 1980-02-01 Jeol Ltd Reflected electron detector for scan electronic microscope
JPS56132756A (en) * 1980-03-19 1981-10-17 Hitachi Ltd Secondary electron detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514683A (en) * 1978-07-19 1980-02-01 Jeol Ltd Reflected electron detector for scan electronic microscope
JPS56132756A (en) * 1980-03-19 1981-10-17 Hitachi Ltd Secondary electron detector

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